Patents by Inventor Pavel Potocek

Pavel Potocek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10846845
    Abstract: Techniques for training an artificial neural network (ANN) using simulated specimen images are described. Simulated specimen images are generated based on data models. The data models describe characteristics of a crystalline material and characteristics of one or more defect types. The data models do not include any image data. Simulated specimen images are input as training data into a training algorithm to generate an artificial neural network (ANN) for identifying defects in crystalline materials. After the ANN is trained, the ANN analyzes captured specimen images to identify defects shown therein.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: November 24, 2020
    Assignee: FEI Company
    Inventors: Ond{hacek over (r)}ej Machek, Tomá{hacek over (s)} Vystav{hacek over (e)}l, Libor Strako{hacek over (s)}, Pavel Potocek
  • Publication number: 20200357097
    Abstract: Methods and systems for neural network based image restoration are disclosed herein. An example method at least includes acquiring a plurality of training image pairs of a sample, where each training image of each of the plurality of training image pairs are images of a same location of a sample, and where each image of the plurality of training image pairs are acquired using same acquisition parameters, updating an artificial neural network based on the plurality of training image pairs, and denoising a plurality of sample images using the updated artificial neural network, where the plurality of sample images are acquired using the same acquisition parameters as used to acquire the plurality of training image pairs.
    Type: Application
    Filed: May 7, 2019
    Publication date: November 12, 2020
    Applicant: FEI Company
    Inventors: Maurice Peemen, Pavel Potocek, Remco Schoenmakers
  • Patent number: 10811223
    Abstract: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.
    Type: Grant
    Filed: October 9, 2018
    Date of Patent: October 20, 2020
    Assignee: FEI Company
    Inventors: Pavel Potocek, Faysal Boughorbel, Mathijs Petrus Wilhelmus van den Boogaard, Emine Korkmaz
  • Publication number: 20200312611
    Abstract: Methods and apparatuses for implementing artificial intelligence enabled volume reconstruction are disclosed herein. An example method at least includes acquiring a first plurality of multi-energy images of a surface of a sample, each image of the first plurality of multi-energy images obtained at a different beam energy, where each image of the first plurality of multi-energy images include data from a different depth within the sample, and reconstructing, by an artificial neural network, at least a volume of the sample based on the first plurality of multi-energy images, where a resolution of the reconstruction is greater than a resolution of the first plurality of multi-energy images.
    Type: Application
    Filed: March 29, 2019
    Publication date: October 1, 2020
    Inventors: Pavel Potocek, Faysal Boughorbel, Maurice Peemen
  • Publication number: 20200111219
    Abstract: Object tracking using image segmentation is disclosed. A captured image of a specimen is obtained. A segmented image is generated based on the captured image. The segmented image indicates segments corresponding to objects of interest. One or more target objects are identified from the objects of interest in the segmented image. Objects of interest most similar, in position and/or shape, to target objects shown in a previous image may be identified. Alternatively, objects of interest that are associated with connecting vectors most similar to the connecting vectors that connect the target objects in a previous image may be identified. A movement vector is drawn from a target object position in the previous image to a target object position in the segmented image. A field of view of the microscope is moved, with respect to the specimen, according to the movement vector to capture another image of the specimen.
    Type: Application
    Filed: September 30, 2019
    Publication date: April 9, 2020
    Applicant: FEI Company
    Inventors: Pavel Potocek, Emine Korkmaz, Remco Schoenmakers
  • Patent number: 10614998
    Abstract: Charging areas in electron microscopy are identified by comparing images obtained in different frames. A difference image or one or more optical flow parameters can be used for the comparison. If charging is detected, electron dose is adjusted, typically just in specimen areas associated with charging. Dose is conveniently adjusted by adjusting electron beam dwell time. Upon adjustment, a final image is obtained, with charging effects eliminated or reduced.
    Type: Grant
    Filed: May 8, 2018
    Date of Patent: April 7, 2020
    Assignee: FEI Company
    Inventors: Remco Geurts, Pavel Potocek, Brad Larson
  • Publication number: 20200034956
    Abstract: Techniques for training an artificial neural network (ANN) using simulated specimen images are described. Simulated specimen images are generated based on data models. The data models describe characteristics of a crystalline material and characteristics of one or more defect types. The data models do not include any image data. Simulated specimen images are input as training data into a training algorithm to generate an artificial neural network (ANN) for identifying defects in crystalline materials. After the ANN is trained, the ANN analyzes captured specimen images to identify defects shown therein.
    Type: Application
    Filed: July 25, 2018
    Publication date: January 30, 2020
    Applicant: FEI Company
    Inventors: Ondrej Machek, Tomás Vystavêl, Libor Strakos, Pavel Potocek
  • Publication number: 20200025696
    Abstract: Techniques for adapting an adaptive specimen image acquisition system using an artificial neural network (ANN) are disclosed. An adaptive specimen image acquisition system is configurable to scan a specimen to produce images of varying qualities. An adaptive specimen image acquisition system first scans a specimen to produce a low-quality image. An ANN identifies objects of interest within the specimen image. A scan mask indicates regions of the image corresponding to the objects of interest. The adaptive specimen image acquisition system scans only the regions of the image corresponding to the objects of interest, as indicated by the scan mask, to produce a high-quality image. The low-quality image and the high-quality image are merged in a final image. The final image shows the objects of interest at a higher quality, and the rest of the specimen at a lower quality.
    Type: Application
    Filed: July 19, 2019
    Publication date: January 23, 2020
    Applicant: FEI Company
    Inventor: Pavel Potocek
  • Publication number: 20190348256
    Abstract: Charging areas in electron microscopy are identified by comparing images obtained in different frames. A difference image or one or more optical flow parameters can be used for the comparison. If charging is detected, electron dose is adjusted, typically just in specimen areas associated with charging. Dose is conveniently adjusted by adjusting electron beam dwell time. Upon adjustment, a final image is obtained, with charging effects eliminated or reduced.
    Type: Application
    Filed: May 8, 2018
    Publication date: November 14, 2019
    Applicant: FEI Company
    Inventors: Remco Geurts, Pavel Potocek, Brad Larson
  • Publication number: 20190287761
    Abstract: The present invention relates to a method of training a network for reconstructing and/or segmenting microscopic images comprising the step of training the network in the cloud. Further, for training the network in the cloud training data comprising microscopic images can be uploaded into the cloud and a network is trained by the microscopic images. Moreover, for training the network the network can be benchmarked after the reconstructing and/or segmenting of the microscopic images. Wherein for benchmarking the network the quality of the image(s) having undergone the reconstructing and/or segmenting by the network can be compared with the quality of the image(s) having undergone reconstructing and/or segmenting by already known algorithm and/or a second network.
    Type: Application
    Filed: December 14, 2018
    Publication date: September 19, 2019
    Inventors: Remco SCHOENMAKERS, Maurice PEEMAN, Faysal BOUGHORBEL, Pavel POTOCEK
  • Publication number: 20190051492
    Abstract: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.
    Type: Application
    Filed: October 9, 2018
    Publication date: February 14, 2019
    Applicant: FEI Company
    Inventors: Pavel Potocek, Faysal Boughorbel, Mathijs Petrus Wilhelmus van den Boogaard, Emine Korkmaz
  • Patent number: 10128080
    Abstract: A method of investigating a specimen using charged-particle microscopy, and a charged particle microscope configured for same.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: November 13, 2018
    Assignee: FEI Company
    Inventors: Faysal Boughorbel, Pavel Potocek, Ingo Gestmann
  • Patent number: 10115561
    Abstract: A method of investigating a specimen using a charged particle microscope, including: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: October 30, 2018
    Assignee: FEI Company
    Inventors: Pavel Potocek, Faysal Boughorbel, Mathijs Petrus Wilhelmus van den Boogaard, Emine Korkmaz
  • Patent number: 10002742
    Abstract: The invention relates to a scanning-type charged particle microscope and a method for operation of such a microscope. Disclosed is a novel scanning strategy to the raster scan or serpentine scan. In some embodiment, the beam scanning motion is separated into short-stroke and long-stroke movements, to be assigned to associate short-stroke and long-stroke scanning devices, which may be beam deflectors or stage actuators. The scan strategy which is less susceptible to effects such as overshoot, settling/resynchronization, and “backlash” effects.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: June 19, 2018
    Assignee: FEI Company
    Inventors: Pavel Potocek, Cornelis Sander Kooijman, Hendrik Jan de Vos, Hendrik Nicolaas Slingerland
  • Patent number: 9934936
    Abstract: A Charged Particle Microscope includes A specimen holder, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; and A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation. The illuminator includes: An aperture plate comprising an aperture region in a path of said beam, for defining a geometry of the beam prior to its impingement upon said specimen. The aperture region includes a distribution of multiple holes, each of which is smaller than a diameter of the beam incident on the aperture plate.
    Type: Grant
    Filed: October 15, 2015
    Date of Patent: April 3, 2018
    Assignee: FEI Company
    Inventors: Pavel Potocek, Franciscus Martinus Henricus Maria van Laarhoven, Faysal Boughorbel, Remco Schoenmakers, Peter Christiaan Tiemeijer
  • Publication number: 20180082444
    Abstract: Methods of investigating a specimen using tomographic imaging include the following steps. A specimen is provided on a specimen holder and a beam of radiation is directed through the specimen and onto a detector, thereby generating an image of the specimen. The directing is repeated for a set of different specimen orientations relative to the beam, thereby generating a corresponding set of images. An iterative mathematical reconstruction technique is used to convert the set of images into a tomogram of at least a portion of the specimen. The reconstruction is mathematically constrained so as to curtail a solution space resulting therefrom. In addition, three-dimensional SEM imagery of at least a part of the specimen that overlaps at least partially with the portion is obtained.
    Type: Application
    Filed: August 28, 2017
    Publication date: March 22, 2018
    Applicant: FEI Company
    Inventors: Remco Schoenmakers, Pavel Potocek
  • Publication number: 20170309448
    Abstract: A method of investigating a specimen using charged-particle microscopy, comprising the following steps: (a) On a surface of the specimen, selecting a virtual sampling grid extending in an XY plane and comprising grid nodes to be impinged upon by a charged-particle probing beam during a two-dimensional scan of said surface; (b) Selecting a landing energy Ei for said probing beam, with an associated nominal Z penetration depth di below said surface; (c) At each of said nodes, irradiating the specimen with said probing beam and detecting output radiation emanating from the specimen in response thereto, thereby generating a scan image Ii; (d) Repeating steps (b) and (c) for a series {Ei} of different landing energies, corresponding to an associated series {di} of different penetration depths, further comprising the following steps: (e) Pre-selecting an initial energy increment ?Ei by which Ei is to be altered after a first iteration of steps (b) and (c); (f) Associating energy increment ?Ei with a correspon
    Type: Application
    Filed: January 23, 2017
    Publication date: October 26, 2017
    Applicant: FEI Company
    Inventors: Faysal Boughorbel, Pavel Potocek, Ingo Gestmann
  • Patent number: 9711325
    Abstract: A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; using a detector arrangement to detect at least a portion of said emitted radiation, the method of which comprises embodying the detector arrangement to detect electrons in the emitted radiation; recording an output On of said detector arrangement as a function of kinetic energy En of said electrons, thus compiling a measurement set M={(On, En)} for a plurality of values of En; using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integer sequenc
    Type: Grant
    Filed: April 21, 2014
    Date of Patent: July 18, 2017
    Assignee: FEI Company
    Inventors: Faysal Boughorbel, Eric Gerardus Theodoor Bosch, Pavel Potocek, Xiaodong Zhuge, Berend Helmerus Lich
  • Publication number: 20170131536
    Abstract: Systems and methods for controlling an imaging device are disclosed. In one aspect, a method determines a set of control parameters for the imaging device, and acquires an image based on the set of control parameters. The method determines a plurality of image quality measurements of the first image. A polygon may be displayed on an electronic display based on a plurality of image quality measurements. For example, positions of polygon vertices may be determined relative to an origin point based on corresponding image quality measurements. In some aspects, input may be received from a user interface indicating a change in position of one or more of the vertices and the corresponding image quality measurements. In some aspects, a new set of control parameters may then be determined to achieve the changed image quality measurement(s). In some aspects a composite measure of the image quality measurements may also be displayed.
    Type: Application
    Filed: August 9, 2016
    Publication date: May 11, 2017
    Inventors: Pavel Potocek, Remco Schoenmakers
  • Publication number: 20160365224
    Abstract: A method of investigating a specimen using a charged particle microscope, including: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.
    Type: Application
    Filed: June 8, 2016
    Publication date: December 15, 2016
    Applicant: FEI Company
    Inventors: Pavel Potocek, Faysal Boughorbel, Mathijs Petrus Wilhelmus van den Boogaard, Emine Korkmaz