Patents by Inventor Pavel Potocek

Pavel Potocek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10128080
    Abstract: A method of investigating a specimen using charged-particle microscopy, and a charged particle microscope configured for same.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: November 13, 2018
    Assignee: FEI Company
    Inventors: Faysal Boughorbel, Pavel Potocek, Ingo Gestmann
  • Patent number: 10115561
    Abstract: A method of investigating a specimen using a charged particle microscope, including: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: October 30, 2018
    Assignee: FEI Company
    Inventors: Pavel Potocek, Faysal Boughorbel, Mathijs Petrus Wilhelmus van den Boogaard, Emine Korkmaz
  • Patent number: 10002742
    Abstract: The invention relates to a scanning-type charged particle microscope and a method for operation of such a microscope. Disclosed is a novel scanning strategy to the raster scan or serpentine scan. In some embodiment, the beam scanning motion is separated into short-stroke and long-stroke movements, to be assigned to associate short-stroke and long-stroke scanning devices, which may be beam deflectors or stage actuators. The scan strategy which is less susceptible to effects such as overshoot, settling/resynchronization, and “backlash” effects.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: June 19, 2018
    Assignee: FEI Company
    Inventors: Pavel Potocek, Cornelis Sander Kooijman, Hendrik Jan de Vos, Hendrik Nicolaas Slingerland
  • Patent number: 9934936
    Abstract: A Charged Particle Microscope includes A specimen holder, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; and A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation. The illuminator includes: An aperture plate comprising an aperture region in a path of said beam, for defining a geometry of the beam prior to its impingement upon said specimen. The aperture region includes a distribution of multiple holes, each of which is smaller than a diameter of the beam incident on the aperture plate.
    Type: Grant
    Filed: October 15, 2015
    Date of Patent: April 3, 2018
    Assignee: FEI Company
    Inventors: Pavel Potocek, Franciscus Martinus Henricus Maria van Laarhoven, Faysal Boughorbel, Remco Schoenmakers, Peter Christiaan Tiemeijer
  • Publication number: 20180082444
    Abstract: Methods of investigating a specimen using tomographic imaging include the following steps. A specimen is provided on a specimen holder and a beam of radiation is directed through the specimen and onto a detector, thereby generating an image of the specimen. The directing is repeated for a set of different specimen orientations relative to the beam, thereby generating a corresponding set of images. An iterative mathematical reconstruction technique is used to convert the set of images into a tomogram of at least a portion of the specimen. The reconstruction is mathematically constrained so as to curtail a solution space resulting therefrom. In addition, three-dimensional SEM imagery of at least a part of the specimen that overlaps at least partially with the portion is obtained.
    Type: Application
    Filed: August 28, 2017
    Publication date: March 22, 2018
    Applicant: FEI Company
    Inventors: Remco Schoenmakers, Pavel Potocek
  • Publication number: 20170309448
    Abstract: A method of investigating a specimen using charged-particle microscopy, comprising the following steps: (a) On a surface of the specimen, selecting a virtual sampling grid extending in an XY plane and comprising grid nodes to be impinged upon by a charged-particle probing beam during a two-dimensional scan of said surface; (b) Selecting a landing energy Ei for said probing beam, with an associated nominal Z penetration depth di below said surface; (c) At each of said nodes, irradiating the specimen with said probing beam and detecting output radiation emanating from the specimen in response thereto, thereby generating a scan image Ii; (d) Repeating steps (b) and (c) for a series {Ei} of different landing energies, corresponding to an associated series {di} of different penetration depths, further comprising the following steps: (e) Pre-selecting an initial energy increment ?Ei by which Ei is to be altered after a first iteration of steps (b) and (c); (f) Associating energy increment ?Ei with a correspon
    Type: Application
    Filed: January 23, 2017
    Publication date: October 26, 2017
    Applicant: FEI Company
    Inventors: Faysal Boughorbel, Pavel Potocek, Ingo Gestmann
  • Patent number: 9711325
    Abstract: A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; using a detector arrangement to detect at least a portion of said emitted radiation, the method of which comprises embodying the detector arrangement to detect electrons in the emitted radiation; recording an output On of said detector arrangement as a function of kinetic energy En of said electrons, thus compiling a measurement set M={(On, En)} for a plurality of values of En; using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integer sequenc
    Type: Grant
    Filed: April 21, 2014
    Date of Patent: July 18, 2017
    Assignee: FEI Company
    Inventors: Faysal Boughorbel, Eric Gerardus Theodoor Bosch, Pavel Potocek, Xiaodong Zhuge, Berend Helmerus Lich
  • Publication number: 20170131536
    Abstract: Systems and methods for controlling an imaging device are disclosed. In one aspect, a method determines a set of control parameters for the imaging device, and acquires an image based on the set of control parameters. The method determines a plurality of image quality measurements of the first image. A polygon may be displayed on an electronic display based on a plurality of image quality measurements. For example, positions of polygon vertices may be determined relative to an origin point based on corresponding image quality measurements. In some aspects, input may be received from a user interface indicating a change in position of one or more of the vertices and the corresponding image quality measurements. In some aspects, a new set of control parameters may then be determined to achieve the changed image quality measurement(s). In some aspects a composite measure of the image quality measurements may also be displayed.
    Type: Application
    Filed: August 9, 2016
    Publication date: May 11, 2017
    Inventors: Pavel Potocek, Remco Schoenmakers
  • Publication number: 20160365224
    Abstract: A method of investigating a specimen using a charged particle microscope, including: Producing and storing a first image, of a first, initial surface of the specimen; In a primary modification step, modifying said first surface, thereby yielding a second, modified surface; Producing and storing a second image, of said second surface; Using a mathematical Image Similarity Metric to perform pixel-wise comparison of said second and first images, so as to generate a primary figure of merit for said primary modification step.
    Type: Application
    Filed: June 8, 2016
    Publication date: December 15, 2016
    Applicant: FEI Company
    Inventors: Pavel Potocek, Faysal Boughorbel, Mathijs Petrus Wilhelmus van den Boogaard, Emine Korkmaz
  • Patent number: 9478393
    Abstract: A method of imaging a specimen comprises directing a beam to irradiate a specimen; detecting radiation emanating from the specimen; scanning the beam along a path; for each sample point in said path, recording a measurement set M={(Dn, Pn)}, where Dn is the detector output as a function of value Pn of measurement parameter P; deconvolving M and spatially resolving it into a set representing depth-resolved imagery of the specimen, whereby, at point pi within the specimen, in a first probing session, irradiating, in a first beam configuration, pi with Point Spread Function F1, whereby said beam configuration is different to P; in at least a second probing session, irradiating, in a second beam configuration, pi with Point Spread Function F2 which overlaps partially with F1 in a zone Oi in which pi is located; sing an Independent Component Analysis algorithm to perform spatial resolution in Oi.
    Type: Grant
    Filed: June 26, 2015
    Date of Patent: October 25, 2016
    Assignee: FEI COMPANY
    Inventors: Pavel Potocek, Faysal Boughorbel, Berend Helmerus Lich, Matthias Langhorst
  • Publication number: 20160118219
    Abstract: The invention relates to a scanning-type charged particle microscope and a method for operation of such a microscope. Disclosed is a novel scanning strategy to the raster scan or serpentine scan. In some embodiment, the beam scanning motion is separated into short-stroke and long-stroke movements, to be assigned to associate short-stroke and long-stroke scanning devices, which may be beam deflectors or stage actuators. The scan strategy which is less susceptible to effects such as overshoot, settling/resynchronization, and “backlash” effects.
    Type: Application
    Filed: October 28, 2015
    Publication date: April 28, 2016
    Applicant: FEI Company
    Inventors: Pavel Potocek, Cornelis Sander Kooijman, Hendrik Jan de Vos, Hendrik Nicolaas Slingerland
  • Publication number: 20160111247
    Abstract: A Charged Particle Microscope, comprising: includes A specimen holder, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; and A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation. The illuminator includes: An aperture plate comprising an aperture region in a path of said beam, for defining a geometry of the beam prior to its impingement upon said specimen. The aperture region includes a distribution of multiple holes, each of which is smaller than a diameter of the beam incident on the aperture plate.
    Type: Application
    Filed: October 15, 2015
    Publication date: April 21, 2016
    Applicant: FEI Company
    Inventors: Pavel Potocek, Franciscus Martinus Henricus Maria van Laarhoven, Faysal Boughorbel, Remco Schoenmakers, Peter Christiaan Tiemeijer
  • Publication number: 20160013015
    Abstract: A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps: Directing a beam of radiation from a source through an illuminator so as to irradiate a surface S of the specimen; Using a detector to detect a flux of radiation emanating from the specimen in response to said irradiation; Causing said beam to follow a scan path relative to said surface; For each of a set of sample points in said scan path, recording an output Dn of the detector as a function of a value Pn of a selected measurement parameter P, thus compiling a measurement set M={(Dn, Pn)}, where n is a member of an integer sequence; Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it so as to produce reconstructed imagery of the specimen, wherein, considered at a given point pi within the specimen, the method comprises the following steps: In a first probing session, employing a first beam configuration B1 to irradiate the point pi w
    Type: Application
    Filed: June 26, 2015
    Publication date: January 14, 2016
    Applicant: FEI Company
    Inventors: Pavel Potocek, Faysal Boughorbel, Berend Helmerus Lich, Matthias Langhorst
  • Publication number: 20150371815
    Abstract: A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps: Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen; Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation; Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position, which method additionally comprises the following steps: In a first sampling session S1gathering detector data from a first collection P1 of sampling points distributed sparsely across the specimen; Repeating this procedure so as to accumulate a set {Pn} of such collections, gathered during an associated set {Sn} of sampling sessions, each set with a cardinality N>1; Assembling an image of the specimen by using the set {Pn} as input to an integrative mathematical reconstruction procedure, wherein, as part of
    Type: Application
    Filed: June 18, 2015
    Publication date: December 24, 2015
    Applicant: FEI Company
    Inventors: Pavel Potocek, Cornelis Sander Kooijman, Hendrik Nicolaas Slingerland, Gerard Anne Nikolaas van Veen, Faysal Boughorbel
  • Publication number: 20150279615
    Abstract: A multi-beam apparatus for inspecting or processing a sample with a multitude of focused beams uses a multitude of detectors for detecting secondary radiation emitted by the sample when is irradiated by the multitude of beams. Each detector signal comprises information caused by multiple beams, the apparatus equipped with a programmable controller for processing the multitude of detector signals to a multitude of output signals, using weight factors so that each output signal represents information caused by a single beam. The weight factors are dynamic weight factors depending on the scan position of the beams with respect to the detectors and the distance between sample and detectors.
    Type: Application
    Filed: March 25, 2015
    Publication date: October 1, 2015
    Applicant: FEI Company
    Inventors: Pavel Potocek, Cornelis S. Kooijman, Hendrik Nicolaas Slingerland, Gerardus Nicolaas Anne Van Veen, Faysal Boughorbel, Albertus Aemillius Seyno Sluijterman, Jacob Simon Faber
  • Publication number: 20140312226
    Abstract: A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; using a detector arrangement to detect at least a portion of said emitted radiation, the method of which comprises embodying the detector arrangement to detect electrons in the emitted radiation; recording an output On of said detector arrangement as a function of kinetic energy En of said electrons, thus compiling a measurement set M={(On, En)} for a plurality of values of En; using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R?{(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integer sequenc
    Type: Application
    Filed: April 21, 2014
    Publication date: October 23, 2014
    Applicant: FEI Company
    Inventors: Faysal Boughorbel, Eric Gerardus Theodoor Bosch, Pavel Potocek, Xiaodong Zhuge, Berend Helmerus Lich
  • Publication number: 20140146160
    Abstract: The invention relates to a method of sampling and displaying information comprising scanning a beam over the sample in a series of N overlapping sub-frames, each comprising Mn scan positions, thereby irradiating the sample at N×Mn scan positions, which form the field of view; detecting a signal, sampled for each scan position, emanating from the sample; and displaying the sub-frames having at least N×Mn pixels in such a way, that after the series of N scans each of the pixels displays information derived from the signal from one or more scan positions; in which after the scan of the first sub-frame each of the pixels displays information derived from the scan positions of the first sub-frame; and after the scan of the second sub-frame each of the pixels displays information derived during the scanning of the first, the second, or both sub-frames.
    Type: Application
    Filed: November 26, 2013
    Publication date: May 29, 2014
    Applicant: FEI Company
    Inventors: Pavel Potocek, Martinus Petrus Maria Bierhoff, Tomás Vystavël, Lukás Drybcák
  • Patent number: 8704176
    Abstract: A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; using a detector arrangement to detect at least a portion of said emitted radiation, the method of which comprises embodying the detector arrangement to detect electrons in the emitted radiation; recording an output On of said detector arrangement as a function of kinetic energy En of said electrons, thus compiling a measurement set M={(On, En)} for a plurality of values of En; using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integer sequenc
    Type: Grant
    Filed: April 4, 2013
    Date of Patent: April 22, 2014
    Assignee: FEI Company
    Inventors: Faysal Boughorbel, Eric Gerardus Theodoor Bosch, Pavel Potocek, Xiaodong Zhuge, Berend Helmerus Lich
  • Patent number: 8586921
    Abstract: A method of charged-particle microscopy, comprising: irradiating a sample surface S to cause radiation to emanate from the sample; detecting at least a portion of said emitted radiation recording an output On of said detector arrangement as a function of emergence angle ?n of said emitted radiation, measured relative to an axis normal to S thus compiling a measurement set M={(On, ?n)} for a plurality of values of ?n; automatically deconvolving the measurement set M and spatially resolve it into a result set R={(VK, Lk)},in which a spatial variable V demonstrates a value Vk at an associated discrete death level Lk referenced to the surface S, whereby n and K are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: November 19, 2013
    Assignee: FEI Company
    Inventors: Faysal Boughorbel, Pavel Potocek, Cornelis Sander Kooijman, Berend Helmerus Lich
  • Publication number: 20130228683
    Abstract: A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; using a detector arrangement to detect at least a portion of said emitted radiation, the method of which comprises embodying the detector arrangement to detect electrons in the emitted radiation; recording an output On of said detector arrangement as a function of kinetic energy En of said electrons, thus compiling a measurement set M={(On, En)} for a plurality of values of En; using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integer sequenc
    Type: Application
    Filed: April 4, 2013
    Publication date: September 5, 2013
    Applicant: FEI Company
    Inventors: Faysal Boughorbel, Eric Gerardus Theodoor Bosch, Pavel Potocek, Xiaodong Zhuge, Berend Helmerus Lich