Patents by Inventor Pavel SEROGLAZOV

Pavel SEROGLAZOV has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation source having debris control
    Patent number: 10588211
    Abstract: A radiation system to generate a radiation emitting plasma, the radiation system include a fuel emitter to provide a fuel target at a plasma formation region, a first laser arranged to provide a first laser beam at the plasma formation region incident on the fuel target to generate a radiation emitting plasma, an imaging device arranged to obtain a first image of the radiation emitting plasma at the plasma formation region, the first image indicating at least one image property of the radiation emitting plasma, and a controller. The controller is arranged to receive the first image, and to generate at least one instruction based on the at least one image property of the radiation emitting plasma to modify operation of at least one component of the radiation system to reduce a detrimental effect of debris.
    Type: Grant
    Filed: October 23, 2014
    Date of Patent: March 10, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Rolf Theodorus Nicolaas Beijsens, Kornelis Frits Feenstra, Arjen Teake De Jong, Reinier Theodorus Martinus Jilisen, Niek Antonius Jacobus Maria Kleemans, Andrey Nikipelov, Pavel Seroglazov, Nicolaas Antonius Allegondus Johannes Van Asten, Harald Ernest Verbraak
  • RADIATION SOURCE
    Publication number: 20160278196
    Abstract: A radiation system to generate a radiation emitting plasma, the radiation system include a fuel emitter to provide a fuel target at a plasma formation region, a first laser arranged to provide a first laser beam at the plasma formation region incident on the fuel target to generate a radiation emitting plasma, an imaging device arranged to obtain a first image of the radiation emitting plasma at the plasma formation region, the first image indicating at least one image property of the radiation emitting plasma, and a controller. The controller is arranged to receive the first image, and to generate at least one instruction based on the at least one image property of the radiation emitting plasma to modify operation of at least one component of the radiation system to reduce a detrimental effect of debris.
    Type: Application
    Filed: October 23, 2014
    Publication date: September 22, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Rolf Theodorus Nicolaas BEIJSENS, Kornelis Frits FEENSTRA, Arjen Teake DE JONG, Reinier Theodorus Martinus JILISEN, Niek Antonius Jacobus Maria KLEEMANS, Andrey NIKIPELOV, Pavel SEROGLAZOV, Nicolaas Antonius Allegondus Johannes VAN ASTEN, Harald Ernest VERBRAAK