Patents by Inventor Pavel Stanislavoich Antsiferov

Pavel Stanislavoich Antsiferov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTEM AND METHOD FOR CLEANING A PATTERNING DEVICE
    Publication number: 20110037960
    Abstract: A lithographic apparatus includes an illumination system configured to condition a beam of radiation, and a support structure configured to support a patterning device. The patterning device is configured to impart a pattern to the beam of radiation. The apparatus includes a patterning device cleaning system configured to provide an electrostatic force to contaminant particles that are on the patterning device and that are electrically charged by the beam of radiation, in order to remove the contaminant particles from the patterning device.
    Type: Application
    Filed: April 16, 2009
    Publication date: February 17, 2011
    Applicant: ASML Netherlands B.V.
    Inventors: Luigi Scaccabarozzi, Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Pavel Stanislavoich Antsiferov, Vladimir Mihailovitch Krivtsun, Leonid Alexandrovich Dorokhin, Maarten Van Kampen