Patents by Inventor Pawel SAFINOWSKI

Pawel SAFINOWSKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INSPECTION APPARATUS
    Publication number: 20230004093
    Abstract: An inspection apparatus for inspecting an object such as a pellicle for use in an EUV lithographic apparatus, the inspection apparatus including: a vacuum chamber; a load lock forming an interface between the vacuum chamber and an ambient environment; and a stage apparatus configured to receive the object from the load lock and displace the object inside the vacuum chamber, wherein the vacuum chamber comprises a first parking position and a second parking position for temporarily storing the object.
    Type: Application
    Filed: September 13, 2022
    Publication date: January 5, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Pawel SAFINOWSKI, Derk Servatius Gertruda BROUNS
  • Inspection apparatus
    Patent number: 11474438
    Abstract: An inspection apparatus for inspecting an object such as a pellicle for use in an EUV lithographic apparatus, the inspection apparatus including: a vacuum chamber; a load lock forming an interface between the vacuum chamber and an ambient environment; and a stage apparatus configured to receive the object from the load lock and displace the object inside the vacuum chamber, wherein the vacuum chamber includes a first parking position and a second parking position for temporarily storing the object.
    Type: Grant
    Filed: October 17, 2019
    Date of Patent: October 18, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Pawel Safinowski, Derk Servatius Gertruda Brouns
  • INSPECTION APPARATUS
    Publication number: 20210382396
    Abstract: An inspection apparatus for inspecting an object such as a pellicle for use in an EUV lithographic apparatus, the inspection apparatus including: a vacuum chamber; a load lock forming an interface between the vacuum chamber and an ambient environment; and a stage apparatus configured to receive the object from the load lock and displace the object inside the vacuum chamber, wherein the vacuum chamber includes a first parking position and a second parking position for temporarily storing the object.
    Type: Application
    Filed: October 17, 2019
    Publication date: December 9, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Pawel SAFINOWSKI, Derk Servatius Gertruda BROUNS