Patents by Inventor Pegeen M. Davis

Pegeen M. Davis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Interconnect structure and process of making the same
    Patent number: 7488679
    Abstract: A method of forming an interconnect structure in an inter-layer dielectric (ILD) material, the method include the steps of creating one or more via openings in the ILD material; forming a first liner covering at least one of the one or more via openings; creating one or more trench openings on top of at least one of the one or more via openings covered by the first liner; and forming a second liner covering the trenching openings and at least part of the first liner. An interconnect structure formed by the method is also provided.
    Type: Grant
    Filed: July 31, 2006
    Date of Patent: February 10, 2009
    Assignee: International Business Machines Corporation
    Inventors: Theodorus Eduardus Standaert, Pegeen M. Davis, John Anthony Fitzsimmons, Stephen Edward Greco, Tze-Man Ko, Naftali Eliahu Lustig, Lee Matthew Nicholson, Sujatha Sankaran
  • INTERCONNECT STRUCTURE AND PROCESS OF MAKING THE SAME
    Publication number: 20080026568
    Abstract: A method of forming an interconnect structure in an inter-layer dielectric (ILD) material, the method include the steps of creating one or more via openings in the ILD material; forming a first liner covering at least one of the one or more via openings; creating one or more trench openings on top of at least one of the one or more via openings covered by the first liner; and forming a second liner covering the trenching openings and at least part of the first liner. An interconnect structure formed by the method is also provided.
    Type: Application
    Filed: July 31, 2006
    Publication date: January 31, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Theodorus Eduardus Standaert, Pegeen M. Davis, John Anthony Fitzsimmons, Stephen Edward Greco, Tze-Man Ko, Naftali Eliahu Lustig, Lee Matthew Nicholson, Sujatha Sankaran