Patents by Inventor Peggy A. Hale

Peggy A. Hale has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Array spreading resistance probe (ASRP) method for profile extraction from semiconductor chips of cellular construction
    Patent number: 5347226
    Abstract: A semiconductor scanning resistance probe which has a support structure formed on a top surface of a substrate to form a cantilever. The support structure has a plurality of openings which extend through the support structure from a connector end to a cone end. An outer surface of the support structure at one side of each opening is cone-shaped so that an apex of the cone forms the cone end. A probe tip is formed in each probe tip opening and along the surface of the support structure. The probe tips are placed on individual semiconductor devices to extract impurity profiles.
    Type: Grant
    Filed: November 16, 1992
    Date of Patent: September 13, 1994
    Assignee: National Semiconductor Corporation
    Inventors: Walter A. Bachmann, Peggy A. Hale