Patents by Inventor Peggy John

Peggy John has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer handling device and method for testing wafers
    Publication number: 20030082031
    Abstract: A wafer handling device comprises metrology equipment (410, 420, 430, 440, 450, 460) for testing selected wafers as well as a stationary wafer storage system (300). The stationary wafer storage system (300) has a buffer (310) to store wafers and a load-and-unload station (320) to transfer selected wafers between the buffer (310) and wafer transport means (330). The wafer transport means are provided for transferring selected wafers between the load-and-unload station (320) and the metrology equipment (410, 420, 430, 440, 450, 460).
    Type: Application
    Filed: October 30, 2001
    Publication date: May 1, 2003
    Inventors: Olivier Vatel, Iraj Shahvandi, Dirk Aderhold, Peggy John, Ralf Zedlitz
  • Method for heating a semiconductor wafer in a process chamber by a shower head, and process chamber
    Patent number: 6290491
    Abstract: Heating (200) a semiconductor wafer (150) in a process chamber (100) is performed in the order of: placing (210) the wafer (100) with the backside (152) on a plurality of support elements (112) that extend from a chuck (100); ejecting (220) a heating gas (122, He) from a shower head (120) located within the process chamber (100) to the frontside (151) of the wafer (150); and moving (230) the support elements (112) into recesses (111) within the chuck (100) to that the wafer backside (152) touches the chuck (110).
    Type: Grant
    Filed: June 29, 2000
    Date of Patent: September 18, 2001
    Assignees: Motorola, Inc., Semiconductor 300 GmbH & Co. KG, Infineon Technologies AG
    Inventors: Iraj Shahvandi, Oliver Vatel, Peggy John