Patents by Inventor PEI-CHI LIU

PEI-CHI LIU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10229853
    Abstract: Non-planar I/O and logic semiconductor devices having different workfunctions on common substrates and methods of fabricating non-planar I/O and logic semiconductor devices having different workfunctions on common substrates are described. For example, a semiconductor structure includes a first semiconductor device disposed above a substrate. The first semiconductor device has a conductivity type and includes a gate electrode having a first workfunction. The semiconductor structure also includes a second semiconductor device disposed above the substrate. The second semiconductor device has the conductivity type and includes a gate electrode having a second, different, workfunction.
    Type: Grant
    Filed: September 27, 2013
    Date of Patent: March 12, 2019
    Assignee: Intel Corporation
    Inventors: Roman W. Olac-Vaw, Walid M. Hafez, Chia-Hong Jan, Pei-Chi Liu
  • Patent number: 10192969
    Abstract: Semiconductor device(s) including a transistor with a gate electrode having a work function monotonically graduating across the gate electrode length, and method(s) to fabricate such a device. In embodiments, a gate metal work function is graduated between source and drain edges of the gate electrode for improved high voltage performance. In embodiments, thickness of a gate metal graduates from a non-zero value at the source edge to a greater thickness at the drain edge. In further embodiments, a high voltage transistor with graduated gate metal thickness is integrated with another transistor employing a gate electrode metal of nominal thickness. In embodiments, a method of fabricating a semiconductor device includes graduating a gate metal thickness between a source end and drain end by non-uniformly recessing the first gate metal within the first opening relative to the surrounding dielectric.
    Type: Grant
    Filed: August 19, 2014
    Date of Patent: January 29, 2019
    Assignee: Intel Corporation
    Inventors: Chia-Hong Jan, Walid Hafez, Hsu-Yu Chang, Roman Olac-Vaw, Ting Chang, Rahul Ramaswamy, Pei-Chi Liu, Neville Dias
  • Publication number: 20190006279
    Abstract: IC device structures including a lateral compound resistor disposed over a surface of a substrate, and fabrication techniques to form such a resistor in conjunction with fabrication of a transistor. Rather than being stacked vertically, a compound resistive trace may include a plurality of resistive materials arranged laterally over a substrate. Along a resistive trace length, a first resistive material is in contact with a sidewall of a second resistive material. A portion of a first resistive material along a centerline of the resistive trace may be replaced with a second resistive material so that the second resistive material is embedded within the first resistive material.
    Type: Application
    Filed: August 26, 2015
    Publication date: January 3, 2019
    Applicant: Intel Corporation
    Inventors: Chen-Guan Lee, Vadym Kapinus, Pei-Chi Liu, Joodong Park, Walid M. Hafez, Chia-Hong Jan
  • Patent number: 10164115
    Abstract: An embodiment includes an apparatus comprising: a non-planar fin having first, second, and third portions each having major and minor axes and each being monolithic with each other; wherein (a) the major axes of the first, second, and third portions are parallel with each other, (b) the major axes of the first and second portions are non-collinear with each other, (c) each of the first, second, and third portions include a node of a transistor selected from the group comprising source, drain, and channel, (e) the first, second, and third portions comprise at least one finFET. Other embodiments are described herein.
    Type: Grant
    Filed: June 27, 2014
    Date of Patent: December 25, 2018
    Assignee: Intel Corporation
    Inventors: Neville L. Dias, Chia-Hong Jan, Walid M. Hafez, Roman W. Olac-Vaw, Hsu-Yu Chang, Ting Chang, Rahul Ramaswamy, Pei-Chi Liu
  • Publication number: 20170207312
    Abstract: Semiconductor device(s) including a transistor with a gate electrode having a work function monotonically graduating across the gate electrode length, and method(s) to fabricate such a device. In embodiments, a gate metal work function is graduated between source and drain edges of the gate electrode for improved high voltage performance. In embodiments, thickness of a gate metal graduates from a non-zero value at the source edge to a greater thickness at the drain edge. In further embodiments, a high voltage transistor with graduated gate metal thickness is integrated with another transistor employing a gate electrode metal of nominal thickness. In embodiments, a method of fabricating a semiconductor device includes graduating a gate metal thickness between a source end and drain end by non-uniformly recessing the first gate metal within the first opening relative to the surrounding dielectric.
    Type: Application
    Filed: August 19, 2014
    Publication date: July 20, 2017
    Inventors: Chia-Hong Jan, Walid Hafez, Hsu-Yu Chang, Roman Olac-Vaw, Ting Chang, Rahul Ramaswamy, Pei-Chi Liu, Neville Dias
  • Publication number: 20170162503
    Abstract: A MOS antifuse with an accelerated dielectric breakdown induced by a void or seam formed in the electrode. In some embodiments, the programming voltage at which a MOS antifuse undergoes dielectric breakdown is reduced through intentional damage to at least part of the MOS antifuse dielectric. In some embodiments, damage may be introduced during an etchback of an electrode material which has a seam formed during backfilling of the electrode material into an opening having a threshold aspect ratio. In further embodiments, a MOS antifuse bit-cell includes a MOS transistor and a MOS antifuse. The MOS transistor has a gate electrode that maintains a predetermined voltage threshold swing, while the MOS antifuse has a gate electrode with a void accelerated dielectric breakdown.
    Type: Application
    Filed: August 19, 2014
    Publication date: June 8, 2017
    Inventors: Roman OLAC-VAW, Walid HAFEZ, Chia-Hong JAN, Hsu-Yu CHANG, Ting CHANG, Rahul RAMASWAMY, Pei-Chi LIU, Neville DIAS
  • Publication number: 20170098709
    Abstract: An embodiment includes an apparatus comprising: a non-planar fm having first, second, and third portions each having major and minor axes and each being monolithic with each other; wherein (a) the major axes of the first, second, and third portions are parallel with each other, (b) the major axes of the first and second portions are non-collinear with each other, (c) each of the first, second, and third portions include a node of a transistor selected from the group comprising source, drain, and channel, (e) the first, second, and third portions comprise at least one fmFET. Other embodiments are described herein.
    Type: Application
    Filed: June 27, 2014
    Publication date: April 6, 2017
    Applicant: Intel Corporation
    Inventors: NEVILLE L. DIAS, CHIA-HONG JAN, WALID M. HAFEZ, ROMAN W. OLAC-VAW, HSU-YU CHANG, TING CHANG, RAHUL RAMASWAMY, PEI-CHI LIU
  • Publication number: 20160225671
    Abstract: Non-planar I/O and logic semiconductor devices having different workfunctions on common substrates and methods of fabricating non-planar I/O and logic semiconductor devices having different workfunctions on common substrates are described. For example, a semiconductor structure includes a first semiconductor device disposed above a substrate. The first semiconductor device has a conductivity type and includes a gate electrode having a first workfunction. The semiconductor structure also includes a second semiconductor device disposed above the substrate. The second semiconductor device has the conductivity type and includes a gate electrode having a second, different, workfunction.
    Type: Application
    Filed: September 27, 2013
    Publication date: August 4, 2016
    Applicant: Intel Corporation
    Inventors: ROMAN W. OLAC-VAW, WALID M. HAFEZ, CHIA-HONG JAN, PEI-CHI LIU