Abstract: A method includes removing a dummy gate stack to form a trench between gate spacers, depositing a gate dielectric extending into the trench, and performing a first treatment process on the gate dielectric. The first treatment process is performed using a fluorine-containing gas. A first drive-in process is then performed to drive fluorine in the fluorine-containing gas into the gate dielectric. The method further includes performing a second treatment process on the gate dielectric, wherein the second treatment process is performed using the fluorine-containing gas, and performing a second drive-in process to drive fluorine in the fluorine-containing gas into the gate dielectric. After the second drive-in process, conductive layers are formed to fill the trench.

Abstract: A method of increasing the resistivity of a silicon carbide wafer includes providing a silicon carbide wafer with a first resistivity, and applying a microwave to treat the silicon carbide wafer. The treated silicon carbide wafer has a second resistivity. The second resistivity is higher than the first resistivity. The microwave treated silicon carbide wafer can be applied in a high-frequency device.

Abstract: The present invention provides a biomembrane phase-change droplet (PCD), including a hydrophobic liquid core; and a phospholipid-containing biomembrane encapsulating the hydrophobic liquid core, wherein the hydrophobic liquid core is vaporized by ultrasonic irradiation. The present disclosure also provides a drug carrier, including a biomembrane phase-change droplet; and a hydrophobic drug embedded on the biomembrane of the biomembrane phase-change droplet, wherein the hydrophobic drug is presented in an amount of 1-10 wt %, based on the weight of the drug carrier. The present invention further provides the use of aforementioned biomembrane phase-change droplet (PCD) and drug carrier.

Abstract: A composite of bacterial cellulose and capsules embedded therein is prepared, for example calcium alginate capsules encapsulating functional components being discretely embedded in a matrix of Gluconacetobacter xylinus cellulose. The functional components may be drugs, probiotics or nutrients, such as fungal polysaccharide.

Abstract: A composite of bacterial cellulose and capsules embedded therein is prepared, for example calcium alginate capsules encapsulating functional components being discretely embedded in a matrix of Gluconacetobacter xylinus cellulose. The functional components may be drugs, probiotics or nutrients, such as fungal polysaccharide.