Patents by Inventor Pei Zou
Pei Zou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11755677Abstract: The present disclosure discloses a data mining method, a data mining apparatus, an electronic device and a storage medium, relates to the technical field of the Internet, and in particular to the Internet big data processing technology. The method includes: acquiring a current article to be mined; obtaining information values required for each data identification strategy of multiple data identification strategies from the current article, and each data identification strategy is used for identifying a preset type of data; identifying a data type of the current article according to the information values required for each data identification strategy to obtain a data type identification result; and determining whether the current article belongs to any preset type of data according to the data type identification result.Type: GrantFiled: December 31, 2021Date of Patent: September 12, 2023Assignee: BEIJING BAIDU NETCOM SCIENCE TECHNOLOGY CO., LTD.Inventors: Qin Mao, Pei Zou, Yue Zhang, Yan Liu, Haichao Deng
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Publication number: 20230004613Abstract: The present disclosure discloses a data mining method, a data mining apparatus, an electronic device and a storage medium, relates to the technical field of the Internet, and in particular to the Internet big data processing technology. The method includes: acquiring a current article to be mined; obtaining information values required for each data identification strategy of multiple data identification strategies from the current article, and each data identification strategy is used for identifying a preset type of data; identifying a data type of the current article according to the information values required for each data identification strategy to obtain a data type identification result; and determining whether the current article belongs to any preset type of data according to the data type identification result.Type: ApplicationFiled: December 31, 2021Publication date: January 5, 2023Inventors: Qin MAO, Pei ZOU, Yue ZHANG, Yan LIU, Haichao DENG
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Patent number: 9852750Abstract: An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical variation is reduced by using a protective layer that comprises a material having mill rates at higher incidence angles that closely approximate the mill rates of the structure at those higher incidence angles. Topographical variation can be intentionally introduced by using a protective layer that comprises a material having mill rates at higher incidence angles that do not closely approximate the mill rates of the structure at those higher incidence angles.Type: GrantFiled: April 18, 2012Date of Patent: December 26, 2017Assignee: FEI CompanyInventors: James P. Nadeau, Pei Zou, Jason H. Arjavac
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Patent number: 9581526Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.Type: GrantFiled: February 18, 2016Date of Patent: February 28, 2017Assignee: FEI COMPANYInventors: Jason Arjavac, Pei Zou, David James Tasker, Maximus Theodorus Otten, Gerhard Daniel
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Publication number: 20160163506Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.Type: ApplicationFiled: February 18, 2016Publication date: June 9, 2016Applicant: FEI CompanyInventors: Jason Arjavac, Pei Zou, David James Tasker, Maximus Theodorus Otten, Gerhard Daniel
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Patent number: 9275831Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.Type: GrantFiled: November 18, 2014Date of Patent: March 1, 2016Assignee: FEI CompanyInventors: Jason Arjavac, Pei Zou, David James Tasker, Maximus Theodorus Otten, Gerhard Daniel
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Publication number: 20150206707Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.Type: ApplicationFiled: November 18, 2014Publication date: July 23, 2015Inventors: Jason Arjavac, Pei Zou, David James Tasker, Maximus Theodorus Otten, Gerhard Daniel
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Patent number: 8890064Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.Type: GrantFiled: February 26, 2013Date of Patent: November 18, 2014Assignee: FEI CompanyInventors: Jason Arjavac, Pei Zou, David James Tasker, Maximus Theodorus Otten, Gerhard Daniel
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Patent number: 8455821Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.Type: GrantFiled: October 22, 2007Date of Patent: June 4, 2013Assignee: FEI CompanyInventors: Jason Arjavac, Pei Zou, David James Tasker, Maximus Theodorus Otten, Gerhard Daniel
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Publication number: 20120199923Abstract: An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical variation is reduced by using a protective layer that comprises a material having mill rates at higher incidence angles that closely approximate the mill rates of the structure at those higher incidence angles. Topographical variation can be intentionally introduced by using a protective layer that comprises a material having mill rates at higher incidence angles that do not closely approximate the mill rates of the structure at those higher incidence angles.Type: ApplicationFiled: April 18, 2012Publication date: August 9, 2012Applicant: FEI COMPANYInventors: JAMES P. NADEAU, PEI ZOU, JASON H. ARJAVAC
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Patent number: 8163145Abstract: An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical variation is reduced by using a protective layer that comprises a material having mill rates at higher incidence angles that closely approximate the mill rates of the structure at those higher incidence angles. Topographical variation can be intentionally introduced by using a protective layer that comprises a material having mill rates at higher incidence angles that do not closely approximate the mill rates of the structure at those higher incidence angles.Type: GrantFiled: October 28, 2009Date of Patent: April 24, 2012Assignee: FEI CompanyInventors: James P Nadeau, Pei Zou, Jason H. Arjavac
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Publication number: 20110006207Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.Type: ApplicationFiled: October 22, 2007Publication date: January 13, 2011Applicant: FEI COMPANYInventors: Jason Arjavac, Pei Zou, David James Tasker, Maximus Theodorus Otten, Gerhard Daniel
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Publication number: 20100108506Abstract: An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical variation is reduced by using a protective layer that comprises a material having mill rates at higher incidence angles that closely approximate the mill rates of the structure at those higher incidence angles. Topographical variation can be intentionally introduced by using a protective layer that comprises a material having mill rates at higher incidence angles that do not closely approximate the mill rates of the structure at those higher incidence angles.Type: ApplicationFiled: October 28, 2009Publication date: May 6, 2010Applicant: FEI COMPANYInventors: JAMES P. NADEAU, Pei Zou, Jason H. Arjavac
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Patent number: 7611610Abstract: An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical variation is reduced by using a protective layer that comprises a material having mill rates at higher incidence angles that closely approximate the mill rates of the structure at those higher incidence angles. Topographical variation can be intentionally introduced by using a protective layer that comprises a material having mill rates at higher incidence angles that do not closely approximate the mill rates of the structure at those higher incidence angles.Type: GrantFiled: November 18, 2003Date of Patent: November 3, 2009Assignee: Fei CompanyInventors: James P. Nadeau, Pei Zou, Jason H. Arjavac
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Patent number: 7054113Abstract: A method for manufacturing a reader/writer is provided having a substrate with an undercoat formed thereon. A first shield is formed over a portion of the undercoat and a pair of reader leads is formed over the first shield and undercoat. A read sensor is formed between the reader leads and a first pole/second shield is formed over the reader leads. A mid coat is formed over the undercoat and the reader leads. A second pole is formed over and in contact with the mid coat. A lead is formed over the second pole. A pedestal is formed over the reader lead and an overcoat is formed over the second pole and the lead and around the pedestal. A pad is then formed over the pedestal.Type: GrantFiled: October 25, 2001Date of Patent: May 30, 2006Assignee: Western Digital (Fremont), Inc.Inventors: David John Seagle, Mark David Thomas, Sandra Sankar, Pei Zou, Carlos Corona
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Publication number: 20050103746Abstract: An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical variation is reduced by using a protective layer that comprises a material having mill rates at higher incidence angles that closely approximate the mill rates of the structure at those higher incidence angles. Topographical variation can be intentionally introduced by using a protective layer that comprises a material having mill rates at higher incidence angles that do not closely approximate the mill rates of the structure at those higher incidence angles.Type: ApplicationFiled: November 18, 2003Publication date: May 19, 2005Inventors: James Nadeau, Pei Zou, Jason Arjavac