Abstract: A method for processing flat articles with acoustical energy. The inventive system method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.

Abstract: The present invention describes an ultrasonic dental insert capable of enhanced operating efficiency. A first transducer generates ultrasonic vibrations. A connecting body has a proximal end and a distal end having a tip attached thereto. The proximal end is attached to the first transducer so as to receive the ultrasonic vibrations therefrom and to transmit the ultrasonic vibrations toward the tip attached to the distal end. The ultrasonic dental insert may be inserted into a handpiece for providing electromagnetic energy to the first transducer to generate the ultrasonic vibrations. The ultrasonic insert, when seated in the handpiece, is substantially decoupled, on a rotary axis, from the handpiece. A rotary force need only be applied to the insert to rotate it in the handpiece. At least one light source substantially proximate or distal to the tip may also be provided.

Abstract: A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.

Abstract: The present invention describes an ultrasonic dental insert capable of enhanced operating efficiency. A first transducer generates ultrasonic vibrations. A connecting body has a proximal end and a distal end having a tip attached thereto. The proximal end is attached to the first transducer so as to receive the ultrasonic vibrations therefrom and to transmit the ultrasonic vibrations toward the tip attached to the distal end. The ultrasonic dental insert may be inserted into a handpiece for providing electromagnetic energy to the first transducer to generate the ultrasonic vibrations. The ultrasonic insert, when seated in the handpiece, is substantially decoupled, on a rotary axis, from the handpiece. A rotary force need only be applied to the insert to rotate it in the handpiece. At least one light source substantially proximate or distal to the tip may also be provided.

Abstract: A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.

Abstract: A system, apparatus and method for processing flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system for processing flat articles comprising: a first dispenser for applying a liquid to a first surface of a flat article; a second dispenser for applying liquid to a second surface of a flat article; a first transducer assembly positioned so as to transmit acoustical energy to the first surface of the flat article; and a second transducer assembly positioned so as to transmit acoustical energy to the second surface of the flat article.

Abstract: An ultrasonic dental insert having at least one light source. A first transducer generates ultrasonic vibrations. A connecting body has a proximal end and a distal end having a tip attached thereto. The proximal end is attached to the first transducer so as to receive the ultrasonic vibrations therefrom and to transmit the ultrasonic vibrations toward the tip attached to the distal end. A second transducer is disposed substantially proximate to the connecting body for generating a voltage signal in response to movement of a portion of the connecting body according to the ultrasonic vibrations. A magnetic material including a source of a magnetic field is present in close proximity to the insert. At least one light source substantially proximate or distal to the tip is connected to and receives the voltage signal from the second transducer to generate light.

Abstract: A powered dental tool generally includes a tool tip at its distal end, a body at its proximal end and a motion generating mechanism. In one aspect, the dental tool includes a tool tip having a proximal end and a distal end along a generally longitudinal axis and a reciprocating motion generating mechanism. The reciprocating motion generating mechanism may repeatedly move the tool tip generally back and forth by a given displacement generally along the tool tip's longitudinal axis. This displacement generally resembles the action of a hand scaler, i.e., a reciprocating motion along the longitudinal axis of the scaler, which is unlike the vibration of most powered scalers. Such action may be advantageous as it may be more intuitive for the dental professional or hygienist and may provide more effective scaling action. It may further be advantageous for a powered scaler to more closely resemble a hand scaler in form, which is small, portable and untethered.

Abstract: The present invention relates to ultrasonic dental tools having an integral sheath and at least one light source adapted to utilize the electromagnetic energy already available in the existing ultrasonic dental unit. The handpiece includes a substantially hollow housing having a primary power source that may include a coil. In one aspect, the ultrasonic dental insert includes a sheath. The sheath may be formed such that it may cover at least part of the handpiece housing. In general, the sheath may serve as a barrier such that it may reduce cross-contamination to and from the patient's mouth. During operation, the primary coil of the handpiece may be inductively coupled to an illumination energy coil such that the illumination energy coil may draw energy from the electromagnetic field of the primary coil to power at least one light emitting element.

Abstract: The present invention relates to ultrasonic dental tools having an insert that includes monitoring mechanism(s) for usage, performance and indication mechanism(s) for replacement. The dental tool includes a dental insert having a transducer for generating ultrasonic vibrations. The ultrasonic dental insert includes a housing and a connecting body having a proximal end and a distal end having a tip attached thereto. The proximal end is attached to the transducer so as to generate the ultrasonic vibrations therefrom and to transmit the ultrasonic vibrations toward the tip attached to the distal end. In one aspect, the ultrasonic dental tool includes monitoring systems for tool usage and condition. The dental tool may include, for example, usage time monitoring circuitry, wear usage circuitry, electromagnetic monitoring circuitry and/or any other appropriate monitoring systems.

Abstract: A wafer cleaning system having a crystal or ceramic transducer assembly. The transducer assembly is adapted to convert electrical energy into sonic energy. The crystal or ceramic has a first conductive surface. The transducer assembly also has a transmitter made of an inert non-reactive plastic that transmits the sonic energy generated by the crystal or ceramic. The transmitter has a surface bonded directly to the conductive surface of the crystal or ceramic.

Abstract: A system, apparatus and method for processing this flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively.

Abstract: A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.

Abstract: A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.

Abstract: A system and method of supplying power to a sonic energy source that minimizes damage to substrate devices during processing while increasing processing efficiency and/or effectiveness. The system and method utilize the concept of ramping the amplitude and/or varying the frequency of the electrical signal used to drive the sonic energy source, thereby resulting in corresponding ramping and/or variations in the amplitude and frequency of the resulting sonic energy being applied to the substrate.