Abstract: Various embodiments of the present disclosure are directed towards a semiconductor device comprising a plurality of quasi field plates (QFPs) for enhanced wafer uniformity and performance. A channel layer and a barrier layer are stacked on a substrate, and the channel layer accommodates a two-dimensional carrier gas (2DCG). A source electrode, a drain electrode, and a gate electrode overlie the channel and barrier layers, and the gate electrode is between the source and drain electrodes in a first direction. The plurality of QFPs are between the gate electrode and the drain electrode. Further, the plurality of QFPs are capacitively or directly electrically coupled to the drain electrode, and are spaced from each other laterally in a line in a second direction transverse to the first direction.

Abstract: A semiconductor device includes a transistor comprising: a plurality of layers, wherein each of the plurality of layers has at least one Group III-V compound material; a gate electrode operatively coupled to at least one of the plurality of layers; a source electrode disposed on a first side of the gate electrode; a drain electrode disposed on a second side of the gate electrode; a field plate disposed between the gate electrode and the drain electrode; and a plurality of conductive lines disposed above the gate electrode, the source electrode, and the drain electrode. The semiconductor device further includes a plurality of test structures, wherein each of the test structures, including a first metal pattern and a second metal pattern, emulates at least one of the gate electrode, the source electrode, the drain electrode, the field plate, or at least one of the plurality of conductive lines.