Patents by Inventor Pen-Liang Mao

Pen-Liang Mao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Modified poly-buffered locos forming technology avoiding the positive charge trapping at the beak of field oxide
    Patent number: 5877073
    Abstract: A method for fabrication of modified poly-buffered LOCOS without positive charges trapping at the beak of the field oxide. The method employs DIW (Deionized Water) to be sprayed onto the wafer before gate electrode forming to eliminate the trapping of positive charges and reduce the undesired charge breakdown thereby increasing the yield of devices not containing this defect.
    Type: Grant
    Filed: May 7, 1996
    Date of Patent: March 2, 1999
    Assignee: Mosel Vitelic, Inc.
    Inventors: Pen-Liang Mao, Jui Chi Chen, Chen Ju-Cheng