Patents by Inventor Peng Jui-Chung

Peng Jui-Chung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS OF DETERMINING QUALITY OF A LIGHT SOURCE
    Publication number: 20100214547
    Abstract: Methods for determining a quality of a light source applied to a photolithographic process are provided. An image sensor array is exposed to a light from a light source. Addresses and respective intensities corresponding to a plurality of locations on a pupil map representing intensity of the light from on the image sensor array. At least one of an inner curve and an outer curve of the pupil map is defined based upon the collected addresses and respective intensities. The light source is applied to a photolithographic process if the addresses have a predetermined pattern relative to the at least one of the inner curve and the outer curve.
    Type: Application
    Filed: May 4, 2010
    Publication date: August 26, 2010
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Nan-Jung CHEN, Peng Jui-Chung, Kevin Hung, An-Kuo Yang