Abstract: A method for measuring a dip angle of oppositely crossly placed paired quartered ring-quartered circle nested polar plates. An annular coplanar capacitance measuring head of a sensor unit consists of four quarter round metal plates and four quarter circular-ring-shaped metal plates, the eight metal plates are coplanar and concentric with one another, and a quarter round metal plate and a quarter circular-ring-shaped metal plate corresponding to the same sector angle form a capacitor. Two annular coplanar capacitance measuring heads are arranged on two round insulating substrates, the two round insulating substrates are used as two bottom surfaces of a cylindrical container, the cylindrical container is transversely arranged, and an insulating liquid equal to ½ volume of the cylindrical container is injected into the cylindrical container in a sealing manner.

Abstract: A high speed high resolution heterodyne interferometric method and system are provided. The invention uses two spatially separated beams with slightly different frequencies and has two measurement signals with opposite Doppler shift. The switching circuit selects one of the two measurement signals for displacement measurement according to the direction and speed of the target movement. In this invention, the measurement is insensitive to the thermal variation; the periodic nonlinearity is essentially eliminated by using two spatially separated beams; the measurable target speed of the interferometer is no longer limited by the beat frequency of the laser source.