Patents by Inventor Pengyu Han
Pengyu Han has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12265377Abstract: A cool cluster comprises one or more transfer chambers; a plurality of process chambers connected to the one or more transfer chambers; and a computing device of the tool cluster. The computing device is to receive first measurements generated by sensors of a first process chamber during or after a process is performed within the first process chamber; determine that the first process chamber is due for maintenance based on processing the first measurements using a first trained machine learning model; after maintenance has been performed on the first process chamber, receive second measurements generated by the sensors during or after a seasoning process is performed within the first process chamber; and determine that the first process chamber is ready to be brought back into service based on processing the second measurements using a second trained machine learning model.Type: GrantFiled: May 30, 2023Date of Patent: April 1, 2025Assignee: Applied Materials, Inc.Inventors: Priyadarshi Panda, Lei Lian, Pengyu Han, Todd J. Egan, Prashant Aji, Eli Mor, Alex J. Tom, Leonard Michael Tedeschi
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Publication number: 20250102356Abstract: An optical reflectometry system, including a processing chamber, a substrate support wherein the substrate support is configured to accept a substrate, a light source configured to transmit an incident light beam, an optical fiber bundle coupled to the light source and optically coupled to a lens assembly, wherein the lens assembly optically coupled to at least a first optical fiber, and configured to transmit to, and receive from, at least one area of the substrate through the transparent window, an optical splitter disposed within the optical fiber bundle; a return fiber bundle coupled to the optical splitter, and coupled to a detection system, wherein the detection system is configured to reference a reference light beam to a reflected light beam to improve a signal-to-noise ratio, analyze a full spectrum of the reflected light beam, and determine at least one characteristic of the at least one area of the substrate.Type: ApplicationFiled: September 22, 2023Publication date: March 27, 2025Inventor: Pengyu HAN
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Patent number: 12236077Abstract: An electronic device manufacturing system configured to receive, by a processor, input data reflecting a feature related to a manufacturing process of a substrate. The manufacturing system is further configured to train a machine-learning model based on the input data reflecting the feature. The manufacturing system is further configured to modify the machine-learning model in view of the virtual knob for the feature.Type: GrantFiled: April 25, 2022Date of Patent: February 25, 2025Assignee: Applied Materials, Inc.Inventors: Jui-Che Lin, Yan-Jhu Chen, Chao-Hsien Lee, Shauh-Teh Juang, Pengyu Han, Wallace Wang
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Publication number: 20250022733Abstract: A method for determining processing chamber conditions using sensor data and a machine learning model is provided. The method includes receiving, by a processing device, sensor data that include chamber data indicating a state of an environment of a processing chamber processing a substrate according to a set of process parameters of a current process. The sensor data further include spectral data indicating optical emission spectra (OES) measurements of a plasma disposed within the processing chamber. The method further includes using the sensor data as input to a machine learning model and obtaining one or more outputs that indicate one or more chamber condition metrics. The method further includes determining a recovery status of a processing chamber based on the one or more chamber condition metrics. The method further includes causing a modification to a performance of the processing chamber based on the recovery status of the processing chamber.Type: ApplicationFiled: September 25, 2024Publication date: January 16, 2025Inventor: Pengyu Han
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Patent number: 12106984Abstract: A method for determining processing chamber conditions using sensor data and a machine learning model is provided. The method includes receiving, by a processing device, sensor data that include chamber data indicating a state of an environment of a processing chamber processing a substrate according to a set of process parameters of a current process. The sensor data further include spectral data indicating optical emission spectra (OES) measurements of a plasma disposed within the processing chamber. The method further includes using the sensor data as input to a machine learning model and obtaining one or more outputs that indicate one or more chamber condition metrics. The method further includes determining a recovery status of a processing chamber based on the one or more chamber condition metrics. The method further includes causing a modification to a performance of the processing chamber based on the recovery status of the processing chamber.Type: GrantFiled: November 23, 2021Date of Patent: October 1, 2024Assignee: Applied Materials, Inc.Inventor: Pengyu Han
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Patent number: 12066639Abstract: Implementations disclosed describe a collimator assembly having a collimator housing that includes an interface configured to optically couple to a process chamber that has a target surface, and a port to receive an optical fiber to deliver, to an enclosure formed by the collimator housing, a first (second) plurality of spectral components of light belonging to a first (second) range of wavelengths, and an achromatic lens located, at least partially, within the enclosure formed by the collimator housing, the achromatic lens to direct the first (second) plurality of spectral components of light onto the target surface to illuminate a first (second) region on the target surface, wherein the second region is substantially the same as the first region.Type: GrantFiled: June 27, 2023Date of Patent: August 20, 2024Assignee: Applied Materials, Inc.Inventors: Pengyu Han, John Anthony O'Malley, Michael N. Grimbergen, Lei Lian, Upendra Ummethala, Michael Kutney
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Publication number: 20240230462Abstract: An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source. The optical bundle includes an emitting optical fiber and a receiving optical fiber disposed at a pairing angle relative to the emitting optical fiber. The optical bundle is coupled to a collimator assembly that receives a light beam of incident light from the emitting optical fiber and directs spectral components of the light beam to first and second portions of a substrate surface. The collimator collects reflected spectral components produced by the spectral components directed to the substrate surface. The collimator assembly transmits the reflected spectral components to the receiving fiber, which transmits the reflected spectral components to a light detection component. A processing device coupled to the light detection component determines a reflectance of the substrate surface based on the reflected spectral components.Type: ApplicationFiled: March 25, 2024Publication date: July 11, 2024Inventors: Pengyu Han, Lei Lian
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Patent number: 11965798Abstract: An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source configured to generate incident light. The optical bundle includes two or more sets of optical fibers that each include an emitting optical fiber and a receiving optical fiber. The receiving optical fibers are disposed within the optical bundle at a pairing angle relative to a respective emitting optical fiber. The optical bundle is also coupled to a collimator assembly that includes an achromatic lens. The achromatic lens receives a first light beam of incident light from a first emitting optical fiber and directs spectral components of the first light beam to a first and second portion of a surface of a substrate. The first portion of the substrate surface is substantially the same as the second portion. The achromatic lens collects reflected spectral components that are produced by the spectral components directed to the first and second portions of the substrate surface.Type: GrantFiled: June 10, 2021Date of Patent: April 23, 2024Assignee: Applied Materials, Inc.Inventors: Pengyu Han, Lei Lian
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Publication number: 20240072141Abstract: Embodiments of the present disclosure disclose a semiconductor device and a method for manufacturing the same. The semiconductor device includes an active region and a passive region, the semiconductor device further includes a source, a gate and a drain located on one side of a substrate, the gate being located between the source and the drain, the gate includes a first end portion and an intermediate portion, the intermediate portion, the source and the drain all being located in the active region, and the first end portion being located in the passive region, the first end portion includes a first sub end portion and a second sub end portion. In a first direction, an extension width of the first sub end portion is greater than that of the intermediate portion, and an extension width of the second sub end portion is greater than that of the first sub end portion.Type: ApplicationFiled: December 21, 2021Publication date: February 29, 2024Inventors: Xi SONG, Pengyu HAN, Huiqin WANG
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Patent number: 11901203Abstract: Methods and systems for detection of an endpoint of a substrate process are provided. A set of machine learning models are trained to provide a metrology measurement value associated with a particular type of metrology measurement for a substrate based on spectral data collected for the substrate. A respective machine learning model is selected to be applied to future spectral data collected during a future substrate process for a future substrate in view of a performance rating associated with the particular type of metrology measurement. Current spectral data is collected during a current process for a current substrate and provided as input to the respective machine learning model. An indication of a respective metrology measurement value corresponding to the current substrate is extracted from one or more outputs of the trained machine learning model.Type: GrantFiled: June 10, 2021Date of Patent: February 13, 2024Assignee: Applied Materials, Inc.Inventors: Pengyu Han, Lei Lian, Shu Yu Chen, Todd Egan, Wan Hsueh Lai, Chao-Hsien Lee, Pin Ham Lu, Zhengping Yao, Barry Craver
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Publication number: 20230342016Abstract: An electronic device manufacturing system configured to receive, by a processor, input data reflecting a feature related to a manufacturing process of a substrate. The manufacturing system is further configured to train a machine-learning model based on the input data reflecting the feature. The manufacturing system is further configured to modify the machine-learning model in view of the virtual knob for the feature.Type: ApplicationFiled: April 25, 2022Publication date: October 26, 2023Inventors: Jui-Che Lin, Yan-Jhu Chen, Chao-Hsien Lee, Shauh-Teh Juang, Pengyu Han, Wallace Wang
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Publication number: 20230341699Abstract: Implementations disclosed describe a collimator assembly having a collimator housing that includes an interface configured to optically couple to a process chamber that has a target surface, and a port to receive an optical fiber to deliver, to an enclosure formed by the collimator housing, a first (second) plurality of spectral components of light belonging to a first (second) range of wavelengths, and an achromatic lens located, at least partially, within the enclosure formed by the collimator housing, the achromatic lens to direct the first (second) plurality of spectral components of light onto the target surface to illuminate a first (second) region on the target surface, wherein the second region is substantially the same as the first region.Type: ApplicationFiled: June 27, 2023Publication date: October 26, 2023Inventors: Pengyu Han, John John O’Malley, Michael N. Grimbergen, Lei Lian, Upendra Ummethala, Michael Kutney
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Publication number: 20230305531Abstract: A cool cluster comprises one or more transfer chambers; a plurality of process chambers connected to the one or more transfer chambers; and a computing device of the tool cluster. The computing device is to receive first measurements generated by sensors of a first process chamber during or after a process is performed within the first process chamber; determine that the first process chamber is due for maintenance based on processing the first measurements using a first trained machine learning model; after maintenance has been performed on the first process chamber, receive second measurements generated by the sensors during or after a seasoning process is performed within the first process chamber; and determine that the first process chamber is ready to be brought back into service based on processing the second measurements using a second trained machine learning model.Type: ApplicationFiled: May 30, 2023Publication date: September 28, 2023Inventors: Priyadarshi Panda, Lei Lian, Pengyu Han, Todd J. Egan, Prashant Aji, Eli Mor, Alex J. Tom, Leonard Michael Tedeschi
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Publication number: 20230306281Abstract: A method includes determining that conditions of a processing chamber have changed since a trained machine learning model associated with the processing chamber was trained. The method further includes determining whether a change in the conditions of the processing chamber is a gradual change or a sudden change. Responsive to determining that the change in the conditions of the processing chamber is a gradual change, the method further includes performing a first training process to generate a new machine learning model. Responsive to determining that the change in the conditions of the processing chamber is a sudden change, the method further includes performing a second training process to generate the new machine learning model. The first training process is different from the second training process.Type: ApplicationFiled: February 9, 2022Publication date: September 28, 2023Inventors: Pengyu Han, Hong-Rui Chen, Shu-Yu Chen, Wan-Hsueh Lai, Pin Ham Lu, Zhengping Yao
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Patent number: 11719952Abstract: Implementations disclosed describe a collimator assembly having a collimator housing that includes an interface configured to optically couple to a process chamber that has a target surface, and a port to receive an optical fiber to deliver, to an enclosure formed by the collimator housing, a first (second) plurality of spectral components of light belonging to a first (second) range of wavelengths, and an achromatic lens located, at least partially, within the enclosure formed by the collimator housing, the achromatic lens to direct the first (second) plurality of spectral components of light onto the target surface to illuminate a first (second) region on the target surface, wherein the second region is substantially the same as the first region.Type: GrantFiled: August 11, 2020Date of Patent: August 8, 2023Assignee: Applied Materials, Inc.Inventors: Pengyu Han, John Anthony O'Malley, Michael N. Grimbergen, Lei Lian, Upendra Ummethala, Michael Kutney
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Patent number: 11709477Abstract: A substrate processing system comprises one or more transfer chambers; a plurality of process chambers connected to the one or more transfer chambers; and a computing device connected to each of the plurality of process chambers. The computing device is to receive first measurements generated by sensors of a first process chamber during or after a process is performed within the first process chamber; determine that the first process chamber is due for maintenance based on processing the first measurements using a first trained machine learning model; after maintenance has been performed on the first process chamber, receive second measurements generated by the sensors during or after a seasoning process is performed within the first process chamber; and determine that the first process chamber is ready to be brought back into service based on processing the second measurements using a second trained machine learning model.Type: GrantFiled: January 6, 2021Date of Patent: July 25, 2023Assignee: Applied Materials, Inc.Inventors: Priyadarshi Panda, Lei Lian, Pengyu Han, Todd J. Egan, Prashant Aji, Eli Mor, Alex J. Tom, Leonard Michael Tedeschi
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Publication number: 20230174341Abstract: A method of taking an elevator by an unmanned device is provided including: through a remote communication connection established with a cloud platform, sending a start floor elevator call request to the cloud platform; receiving real-time running information of at least one elevator returned by the cloud platform; selecting a target elevator according to the real-time running information of the at least one elevator, and entering the target elevator; and establishing a communication connection with an elevator controlling communication device of the target elevator, and sending a target floor elevator call request to an elevator controlling device of the target elevator through the communication connection such that the elevator controlling device controls the target elevator to run to a target floor based on the target floor elevator call request, where the elevator controlling communication device of the target elevator is connected with the elevator controlling device of the target elevator.Type: ApplicationFiled: May 14, 2021Publication date: June 8, 2023Inventors: Yun WANG, Jie SHI, Kang SUN, Suchen MA, Pengyu HAN
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Publication number: 20220399215Abstract: Methods and systems for detection of an endpoint of a substrate process are provided. A set of machine learning models are trained to provide a metrology measurement value associated with a particular type of metrology measurement for a substrate based on spectral data collected for the substrate. A respective machine learning model is selected to be applied to future spectral data collected during a future substrate process for a future substrate in view of a performance rating associated with the particular type of metrology measurement. Current spectral data is collected during a current process for a current substrate and provided as input to the respective machine learning model. An indication of a respective metrology measurement value corresponding to the current substrate is extracted from one or more outputs of the trained machine learning model.Type: ApplicationFiled: June 10, 2021Publication date: December 15, 2022Inventors: Pengyu Han, Lei Lian, Shu Yu Chen, Todd Egan, Wan Hsueh Lai, Chao-Hsien Lee, Pin Ham Lu, Zhengping Yao, Barry Craver
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Publication number: 20220397482Abstract: An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source configured to generate incident light. The optical bundle includes two or more sets of optical fibers that each include an emitting optical fiber and a receiving optical fiber. The receiving optical fibers are disposed within the optical bundle at a pairing angle relative to a respective emitting optical fiber. The optical bundle is also coupled to a collimator assembly that includes an achromatic lens. The achromatic lens receives a first light beam of incident light from a first emitting optical fiber and directs spectral components of the first light beam to a first and second portion of a surface of a substrate. The first portion of the substrate surface is substantially the same as the second portion. The achromatic lens collects reflected spectral components that are produced by the spectral components directed to the first and second portions of the substrate surface.Type: ApplicationFiled: June 10, 2021Publication date: December 15, 2022Inventors: Pengyu Han, Lei Lian
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Publication number: 20220397515Abstract: A machine learning model trained to provide metrology measurements for a substrate is provided. Training data generated for a prior substrate processed according to a prior process is provided to train the model. The training data includes a training input including a subset of historical spectral data extracted from a normalized set of historical spectral data collected for the prior substrate during the prior process. The subset of historical spectral data includes an indication of historical spectral features associated with a particular type of metrology measurement. The training data also includes a training output including a historical metrology measurement obtained for the prior substrate, the historical metrology measurement associated with the particular type of metrology measurement. Spectral data is collected for a current substrate processed according to a current process.Type: ApplicationFiled: June 10, 2021Publication date: December 15, 2022Inventors: Pengyu Han, Lei Lian, Shu Yu Chen, Todd Egan, Wan Hsueh Lai, Chao-Hsien Lee, Pin Ham Lu, Zhengping Yao, Barry Craver