Patents by Inventor Penta Naresh Kumar

Penta Naresh Kumar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CHEMICAL MECAHNICAL POLISHING COMPOSITION AND METHOD OF POLISHING SILCON DIOXIDE OVER SILICON NITIRIDE
    Publication number: 20200102475
    Abstract: A chemical mechanical polishing composition for polishing silicon dioxide over silicon nitride includes certain acidic heterocyclic nitrogen compounds having a pK value of 5 of less. Also, methods for polishing a substrate to remove some of the silicon dioxide and silicon nitride are disclosed.
    Type: Application
    Filed: September 28, 2018
    Publication date: April 2, 2020
    Inventors: Penta Naresh Kumar, Robert L. Auger