Patents by Inventor Per Bjorkman
Per Bjorkman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 10190932Abstract: The present invention relates to a method for preventing gases and fluids to penetrate a surface of an object, comprising the steps of: depositing (S1) an amorphous metal (5) on a surface of an object (4); forming (S2) a continuous layer of the amorphous metal (5) on the surface of the object (4); binding (S3) the amorphous metal (5) to the surface of the object by chemical binding; and passivation (S4) of a surface of the amorphous metal (5) facing away from the surface of the object (4).Type: GrantFiled: October 28, 2013Date of Patent: January 29, 2019Assignee: INFICON GMBHInventors: Per Bjorkman, Bjorgvin Hjorvarsson
-
Publication number: 20160252419Abstract: The present invention relates to a method for preventing gases and fluids to penetrate a surface of an object, comprising the steps of: depositing (S1) an amorphous metal (5) on a surface of an object (4); forming (S2) a continuous layer of the amorphous metal (5) on the surface of the object (4); binding (S3) the amorphous metal (5) to the surface of the object by chemical binding; and passivation (S4) of a surface of the amorphous metal (5) facing away from the surface of the object (4).Type: ApplicationFiled: October 28, 2013Publication date: September 1, 2016Inventors: Per BJORKMAN, Bjorgvin HJORVARSSON
-
Patent number: 7614308Abstract: A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.Type: GrantFiled: December 4, 2008Date of Patent: November 10, 2009Assignee: Inficon GmbHInventors: Walter Christian Berner, Jarkko Antila, Gaétan Duplain, Per Björkman, Tove Manselin, Oskar Untermarzoner
-
Publication number: 20090158853Abstract: A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.Type: ApplicationFiled: December 4, 2008Publication date: June 25, 2009Inventors: WALTER CHRISTIAN BERNER, Jarkko Antila, Gaetan Duplain, Per Bjorkman, Tove Manselin, Oskar Untermarzoner
-
Patent number: 7536915Abstract: Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm (2) at a spacing a first housing plate (1) is disposed sealing in the margin region with a joining means (3), and that on the other side of the diaphragm (2) at a spacing a second housing plate (4) is disposed sealing in the margin region with a joining means (3), and that the second housing plate (4) has an opening at which a connection means (5) is disposed sealing with joining means (3) for the connection of the measuring cell (8) with the medium to be measured, wherein the diaphragm (2) and the two housing plates (1, 4) are comprised of a metal oxide.Type: GrantFiled: November 6, 2007Date of Patent: May 26, 2009Assignee: Inficon GmbHInventors: Carsten Strietzel, Per Björkman, Walter Berner
-
Patent number: 7500300Abstract: A manufacturing method for a vacuum measuring cell provides first and second Al2O3 ceramic or sapphire housing bodies on opposite sides of an Al2O3 ceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.Type: GrantFiled: October 16, 2007Date of Patent: March 10, 2009Assignee: Inficon GmbHInventors: Urs Wälchli, Per Björkman, Heikki Saari, Jarkko Antila, Hansjakob Hanselmann, Martin Wüest
-
Patent number: 7443169Abstract: A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.Type: GrantFiled: November 21, 2006Date of Patent: October 28, 2008Assignee: Inficon GmbHInventors: Per Björkman, Urs Wälchli, Hansjakob Hanselmann, Stanislav Duris, Martin Wüest
-
Publication number: 20080110269Abstract: Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm (2) at a spacing a first housing plate (1) is disposed sealing in the margin region with a joining means (3), and that on the other side of the diaphragm (2) at a spacing a second housing plate (4) is disposed sealing in the margin region with a joining means (3), and that the second housing plate (4) has an opening at which a connection means (5) is disposed sealing with joining means (3) for the connection of the measuring cell (8) with the medium to be measured, wherein the diaphragm (2) and the two housing plates (1, 4) are comprised of a metal oxide.Type: ApplicationFiled: November 6, 2007Publication date: May 15, 2008Inventors: Carsten STRIETZEL, Per BJORKMAN, Walter BERNER
-
Publication number: 20080110008Abstract: A manufacturing method for a vacuum measuring cell provides first and second Al2O3 ceramic or sapphire housing bodies on opposite sides of an Al2O3 ceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fibre outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.Type: ApplicationFiled: October 16, 2007Publication date: May 15, 2008Inventors: Urs Walchli, Per Bjorkman, Heikki Saari, Jarkko Antila, Hansjakob Hanselmann, Martin Wuest
-
Patent number: 7305888Abstract: A vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3 ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.Type: GrantFiled: August 1, 2006Date of Patent: December 11, 2007Assignee: Inficon GmbHInventors: Urs Wälchli, Per Björkman, Heikki Saari, Jarkko Antila, Hansjakob Hanselmann, Martin Wüest
-
Publication number: 20070120568Abstract: A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.Type: ApplicationFiled: November 21, 2006Publication date: May 31, 2007Inventors: Per Bjorkman, Urs Walchli, Hansjakob Hanselmann, Stanislav Duris, Martin Wuest
-
Publication number: 20070089524Abstract: A capacitive vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3 ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.Type: ApplicationFiled: August 1, 2006Publication date: April 26, 2007Inventors: Urs Walchli, Per Bjorkman, Heikki Saari, Jarkko Antila, Hansjakob Hanselmann, Martin Wuest
-
Patent number: 6619131Abstract: A pressure sensor has a baseplate and a support plate with a membrane. Layers on the membrane and the support plate are connected to a circuit for capacitively measuring pressure to generate a first pressure signal. A thermal conductivity measuring element that generates a second pressure signal has a heating element connected to the baseplate adjacent the support plate at a location opposite from the membrane for protecting the membrane from thermal effects. The method uses the sensor apparatus to generate an output signal representing a measured result when the measured result is above a transition value, on the basis of the first pressure signal and, when the pressure falls below a threshold value, any offset of the first pressure signal is compensated in such a way that determination of the output signal on the basis of the first pressure signal leads to the same result as determination of the output signal on the basis of the second pressure signal.Type: GrantFiled: March 14, 2002Date of Patent: September 16, 2003Assignee: Unaxis Balzers AGInventors: Urs Wälchli, Per Björkman, Rudolf Stocker, Marcel Gantner
-
Publication number: 20020129657Abstract: A pressure sensor has a baseplate and a support plate with a membrane. Layers on the membrane and the support plate are connected to a circuit for capacitively measuring pressure to generate a first pressure signal. A thermal conductivity measuring element that generates a second pressure signal has a heating element connected to the baseplate adjacent the support plate at a location opposite from the membrane for protecting the membrane from thermal effects. The method uses the sensor apparatus to generate an output signal representing a measured result when the measured result is above a transition value, on the basis of the first pressure signal and, when the pressure falls below a threshold value, any offset of the first pressure signal is compensated in such a way that determination of the output signal on the basis of the first pressure signal leads to the same result as determination of the output signal on the basis of the second pressure signal.Type: ApplicationFiled: March 14, 2002Publication date: September 19, 2002Applicant: Unaxis Balzers AktiengesellschaftInventors: Urs Walchli, Per Bjorkman, Rudolf Stocker, Marcel Gantner
-
Patent number: 6119523Abstract: A method for electronic compensation of erroneous readings is based on the observation that a sensor serving as a transducer is caused to resonate. The erroneous reading caused by the resonance is measured and a compensation signal is feedback into the measurement element, the signal being essentially unfiltered. An apparatus uses error detection and compensation circuits whose upper barrier frequency are above the resonance frequency of the transducer for detecting an error signal caused by resonance in the transducer and for generating a compensation signal for feeding into the detector sensor.Type: GrantFiled: July 1, 1999Date of Patent: September 19, 2000Assignee: Balzers and Leybold Instrumentation ABInventors: Ray Olsson, Per Bjorkman
-
Patent number: 5962791Abstract: In order to cover a large measuring range extending from about 10.sup.-6 mbar to about 10 bar, a simple, compact and economically producible pressure sensor (3) arranged in a protective tube (1) has, on a support plate (5), a ceramic membrane (6) which, together with the support plate (5), forms a capacitive measuring element for the determination of pressures between about 0.1 mbar and 10 bar, and two measuring wires (11, 12) which are arranged adjacent to the membrane (6) and constitute a Pirani measuring element with substantial compensation of the effect of the wall temperature, for the determination of pressures between about 10.sup.-6 mbar and 1 mbar. The membrane (6) is shielded from the radiation of the measuring wires (11, 12) by a protective ring (16).Type: GrantFiled: July 16, 1998Date of Patent: October 5, 1999Assignee: Balzers AktiengellschaftInventors: Urs Walchli, Per Bjorkman