Patents by Inventor Per Cederstav
Per Cederstav has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7762526Abstract: A Pendulum Valve having Independently and Rapidly Controllable Theta- and Z-axis Motion. The valve actuator used in the present invention provides the benefit of wide open unrestricted flow of a pendulum valve coupled with the high-resolution and wide dynamic range flow throttling of a ball or butterfly valve. The actuator mechanism will include motor drives and associated control system so that the drives are closely coupled to give highly controlled motion. The drive assembly introduces a concentric shaft arrangement that, when coupled with the highly controllable motor drives, exploits a cam-follower arrangement to make the relative rotation between the two concentric shafts result in highly controlled theta and z-axis motion. Finally, the plate to seal spacing afforded is greater than previously possible with prior valve actuator mechanisms, thereby substantially reducing flow turbulence through the valve as the valve plate eclipses the valve ports.Type: GrantFiled: August 27, 2007Date of Patent: July 27, 2010Assignee: Nor-Cal Products, Inc.Inventors: Nate Coleman, John Slaney, Sean Mallory, Per Cederstav, David Kruse, William Ballard, Robert Woods
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Publication number: 20090057596Abstract: A Pendulum Valve having Independently and Rapidly Controllable Theta- and Z-axis Motion. The valve actuator used in the present invention provides the benefit of wide open unrestricted flow of a pendulum valve coupled with the high-resolution and wide dynamic range flow throttling of a ball or butterfly valve. The actuator mechanism will include motor drives and associated control system so that the drives are closely coupled to give highly controlled motion. The drive assembly introduces a concentric shaft arrangement that, when coupled with the highly controllable motor drives, exploits a cam-follower arrangement to make the relative rotation between the two concentric shafts result in highly controlled theta and z-axis motion. Finally, the plate to seal spacing afforded is greater than previously possible with prior valve actuator mechanisms, thereby substantially reducing flow turbulence through the valve as the valve plate eclipses the valve ports.Type: ApplicationFiled: August 27, 2007Publication date: March 5, 2009Inventors: Nate Coleman, John Slaney, Sean Mallory, Per Cederstav, David Kruse, William Ballard, Robert Woods
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Patent number: 6814096Abstract: A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components).Type: GrantFiled: December 15, 2000Date of Patent: November 9, 2004Assignee: Nor-Cal Products, Inc.Inventors: Emmanuel Vyers, William Ballard, David Kruse, Sean Mallory, Per Cederstav
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Publication number: 20040159354Abstract: A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components).Type: ApplicationFiled: August 28, 2003Publication date: August 19, 2004Inventors: Per Cederstav, Emmanuel Vyers, William Ballard, Sean Mallory
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Patent number: 6612331Abstract: A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components).Type: GrantFiled: January 18, 2002Date of Patent: September 2, 2003Inventors: Per Cederstav, Sean Mallory, Emmanuel Vyers, William Ballard, David Kruse
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Publication number: 20020117212Abstract: A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components).Type: ApplicationFiled: December 15, 2000Publication date: August 29, 2002Inventors: Emmanuel Vyers, William Ballard, David Kruse, Sean Mallory, Per Cederstav
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Publication number: 20020109115Abstract: A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components).Type: ApplicationFiled: January 18, 2002Publication date: August 15, 2002Applicant: Nor-Cal Products, Inc.Inventors: Per Cederstav, Sean Mallory, Emmanuel Vyers, William Ballard, David Kruse