Abstract: A modular transferable ultra-high vacuum compatible device has a body with a tunnel through its thickness. An interferometric sensor is mounted above the body and has a brace on which a cantilever is disposed and through which an optical fiber passes so that the two may be aligned prior to installation in an atomic force measurement apparatus. The sensor-mounted body is coupled to a mount for engaging an atomic force measurement apparatus to act as the interferometric head of the apparatus.

Abstract: The invention provides methods and apparatus for defining a pattern on a substrate. An example apparatus includes: an emission source for directing an emission to the substrate, defining a working position between the emission source and the substrate, at least one shadow mask having one or more apertures and at least one inspection device for inspecting the properties of the substrate and/or the pattern, the inspection device having at least one inspection tool. The shadow mask and the inspection tool are separately provided on a movable portion, so that the shadow mask and the inspection tool are subsequently movable into the working position. The invention is further related to a method for defining a pattern on a substrate.

Abstract: The invention provides an apparatus for defining a pattern on a substrate (52). The apparatus comprises an emission source (48) for directing an emission (50) to the substrate (52), defining a working position (60) between the emission source (48) and the substrate (52), at least one shadow mask (66) having one or more apertures (68, 70, 72, 74) and at least one inspection device for inspecting the properties of the substrate (52) and/or the pattern, the inspection device having at least one inspection tool (82; 88, 90, 92, 94). The shadow mask (66) and the inspection tool (82; 88, 90, 92, 94) are separately provided on a movable portion (6), so that the shadow mask (66) and the inspection tool (82; 88, 90, 92, 94) are subsequently movable into the working position (60). The invention is further related to a method for defining a pattern on a substrate.

Abstract: The invention provides methods and apparatus for defining a pattern on a substrate. An example apparatus includes: an emission source for directing an emission to the substrate, defining a working position between the emission source and the substrate, at least one shadow mask having one or more apertures and at least one inspection device for inspecting the properties of the substrate and/or the pattern, the inspection device having at least one inspection tool. The shadow mask and the inspection tool are separately provided on a movable portion, so that the shadow mask and the inspection tool are subsequently movable into the working position. The invention is further related to a method for defining a pattern on a substrate.

Abstract: The invention provides methods and apparatus for defining a pattern on a substrate. An example apparatus includes: an emission source for directing an emission to the substrate, defining a working position between the emission source and the substrate, at least one shadow mask having one or more apertures and at least one inspection device for inspecting the properties of the substrate and/or the pattern, the inspection device having at least one inspection tool. The shadow mask and the inspection tool are separately provided on a movable portion, so that the shadow mask and the inspection tool are subsequently movable into the working position. The invention is further related to a method for defining a pattern on a substrate.