Patents by Inventor Perng-Fei Yuh
Perng-Fei Yuh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230057357Abstract: A sense amplifier including a first input transistor having a first input gate and a first drain/source terminal, a second input transistor having a second input gate and a second drain/source terminal, a latch circuit, and a first capacitor. The latch circuit includes a first latch transistor having a third drain/source terminal connected to the first drain/source terminal and a second latch transistor having a fourth drain/source terminal connected to the second drain/source terminal. The first capacitor is connected on one side to the first input gate and on another side to the fourth drain/source terminal to reduce a coupling effect in the sense amplifier.Type: ApplicationFiled: August 20, 2021Publication date: February 23, 2023Inventors: Ku-Feng Lin, Jui-Che Tsai, Perng-Fei Yuh, Yih Wang
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Publication number: 20230050710Abstract: A memory device is disclosed, including a bit cell storing a bit data. The bit cell includes multiple first transistors coupled to a node, multiple second transistors each coupled in series to a corresponding one of the first transistors, and at least one third transistor. The first transistors are turned on in response to a control signal. The second transistors are turned on in response to a first word line signal. The at least one third transistor has a control terminal to receive a second word line signal. In a programming mode of the memory device, the at least one third transistor provides, in response to the second word line signal, an adjust voltage to the node. The adjust voltage is associated with a voltage level of a first terminal of the at least one third transistor.Type: ApplicationFiled: August 13, 2021Publication date: February 16, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Gu-Huan LI, Tung-Cheng CHANG, Perng-Fei YUH, Chia-En HUANG, Chun-Ying LEE, Yih WANG
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Publication number: 20230037696Abstract: In some aspects of the present disclosure, a memory circuit is disclosed. In some aspects, the memory circuit includes a first storage element coupled to a first bit line, a first transistor coupled between the first storage element and a center node, a second storage element coupled to a second bit line, a second transistor coupled between the second storage element and the center node, and a third transistor coupled between the center node and a reference node.Type: ApplicationFiled: January 28, 2022Publication date: February 9, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ku-Feng Lin, Perng-Fei Yuh, Meng-Sheng Chang
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Publication number: 20230031722Abstract: The present disclosure relates to an ion beam etching (IBE) system including a process chamber. The process chamber includes a plasma chamber configured to provide plasma. In addition, the process chamber includes an accelerator grid having multiple accelerator grid elements including a first accelerator grid element and a second accelerator grid element. A first wire is coupled to the first accelerator grid element and configured to supply a first voltage to the first accelerator grid element. A second wire is coupled to the second accelerator grid element and configured to supply a second voltage to the second accelerator grid element, where the second voltage is different from the first voltage. A first ion beam through a first hole is controlled by the first accelerator grid element, and a second ion beam through a second hole is controlled by the second accelerator grid element.Type: ApplicationFiled: July 23, 2021Publication date: February 2, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chansyun David YANG, Keh-Jeng CHANG, Chan-Lon YANG, Perng-Fei YUH
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Patent number: 11545218Abstract: A memory device has a plurality of bit cells, each of which includes an SRAM cell having a storage node selectively connectable to a first bit line in response to a control signal received on a first word line. Each bit cell further includes an MRAM cell selectively connectable to the storage node of the SRAM cell in response to a control signal received on a second word line.Type: GrantFiled: November 10, 2020Date of Patent: January 3, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Perng-Fei Yuh, Jui-Che Tsai, Hiroki Noguchi, Yih Wang
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Publication number: 20220383934Abstract: In some aspects of the present disclosure, a memory device is disclosed. In some aspects, the memory device includes a plurality of memory cells arranged in a plurality of rows and a plurality of columns; a plurality of word lines, each of the word lines coupled to a corresponding row of the memory cells; a plurality of bit lines, each of the bit lines coupled to a corresponding column of the memory cells; and a plurality of second word lines, each of the second word lines coupled to a corresponding column of the memory cells.Type: ApplicationFiled: May 26, 2021Publication date: December 1, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yoshitaka Yamauchi, Meng-Sheng Chang, Hiroki Noguchi, Perng-Fei Yuh
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Publication number: 20220384599Abstract: A semiconductor device with different configurations of nanostructured channel regions and a method of fabricating the semiconductor device are disclosed. The semiconductor device includes a fin structure disposed on a substrate, a stack of nanostructured horizontal channel (NHC) regions disposed on the fin structure, a nanostructured vertical channel (NVC) region disposed within the stack of NHC regions, a source/drain (S/D) region disposed on the fin structure, and a gate structure disposed on the NHC regions and on portions of the NVC region that are not covered by the NHC regions and the fin structure.Type: ApplicationFiled: May 28, 2021Publication date: December 1, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chansyun David YANG, Keh-Jeng CHANG, Chan-Lon YANG, Perng-Fei YUH
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Publication number: 20220367627Abstract: A semiconductor device with different configurations of gate structures and a method of fabricating the semiconductor device are disclosed. The semiconductor device includes a stack of nanostructured channel regions disposed on a fin structure, a first gate structure disposed within the stack of nanostructured channel regions, a second gate structure surrounds the first gate structure about a first axis and surrounds the nanostructured channel regions about a second axis different from the first axis, and first and second contact structures disposed on the first and second gate structures, respectively.Type: ApplicationFiled: May 13, 2021Publication date: November 17, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chansyun David YANG, Keh-Jeng CHANG, Chan-Lon YANG, Perng-Fei YUH
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Publication number: 20220366956Abstract: A memory device includes a plurality of memory cells. Each memory cell includes a multi-gate FeFET that has a first source/drain terminal, a second source/drain terminal, and a gate with a plurality of ferroelectric layers configured such that each of the ferroelectric layers has a respective unique switching E-field.Type: ApplicationFiled: July 29, 2022Publication date: November 17, 2022Inventor: Perng-Fei Yuh
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Publication number: 20220366984Abstract: A memory circuit includes a plurality of bitcells coupled to a plurality of bitlines, a plurality of wordlines, a plurality of source lines, and a control line. A first of the bitcells and a second of the bitcells are coupled to a first of the bitlines. The first bitcell is coupled to a first of the source lines. The second bitcell is coupled to a second of the source lines. The first source line is different from the second source line.Type: ApplicationFiled: December 17, 2021Publication date: November 17, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yih WANG, Tung-Cheng CHANG, Perng-Fei YUH, Gu-Huan LI, Chia-En HUANG, Chun-Ying LEE
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Publication number: 20220351939Abstract: The present disclosure relates to an ion beam etching (IBE) system including a plasma chamber configured to provide plasma, a screen grid, an extraction grid, an accelerator grid, and a decelerator grid. The screen grid receives a screen grid voltage to extract ions from the plasma within the plasma chamber to form an ion beam through a hole. The extraction grid receives an extraction grid voltage, where a voltage difference between the screen grid voltage and the extraction grid voltage determines an ion current density of the ion beam. The accelerator grid receives an accelerator grid voltage. A voltage difference between the extraction grid voltage and the accelerator grid voltage determines an ion beam energy for the ion beam. The IBE system can further includes a deflector system having a first deflector plate and a second deflector plate around a hole to control the direction of the ion beam.Type: ApplicationFiled: April 30, 2021Publication date: November 3, 2022Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chansyun David Yang, Keh-Jeng CHANG, Chan-Lon YANG, Perng-Fei YUH
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Publication number: 20220342436Abstract: The present disclosure provides a bias generating device and a method for generating bias. A bias generating device includes a first diode-connected transistor pair connected to receive a first voltage; a second diode-connected transistor pair connected to receive a second voltage; and a first transistor pair connected to the first diode-connected transistor pair and the second diode-connected transistor pair. The first transistor pair is configured to generate a third voltage in response to the first voltage and the second voltage.Type: ApplicationFiled: April 22, 2021Publication date: October 27, 2022Inventors: PERNG-FEI YUH, YOSHITAKA YAMAUCHI, YIH WANG
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Publication number: 20220336294Abstract: An apparatus includes a beam conditioning assembly configured to output one or more wavelengths to a substrate being processed and receive one or more reflected wavelengths from the substrate, and a machine learning device configured to process the one or more reflected wavelengths to predict a process variable and compare the predicted process variable with a measured process variable to obtain a comparison result.Type: ApplicationFiled: August 10, 2021Publication date: October 20, 2022Inventors: Chansyun Yang, Chan-Lon Yang, Keh-Jeng Chang, Perng-Fei Yuh
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Publication number: 20220336031Abstract: Systems, devices, and methods are described herein for a programmable memory array. A programmable memory system includes an array of programmable memory bit cells. A memory bit cell of the array includes a first transistor of a first type controlled by a bit line, a second transistor of a second type responsive to a word line and a second word line via a logic gate, and a third transistor of the second type responsive to the word line. The first word line is positioned substantially perpendicular to the bit line, and the second word line is positioned substantially parallel to the bit line. The word line is activated via an X portion of an address. While the second word line is activated via a Y portion of the address.Type: ApplicationFiled: December 21, 2021Publication date: October 20, 2022Inventors: Meng-Sheng Chang, Yoshitaka Yamauchi, Perng-Fei Yuh
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Publication number: 20220328116Abstract: A memory device and a method of operating a memory device are disclosed. In one aspect, the memory device includes a plurality of non-volatile memory cells, each of the plurality of non-volatile memory cells is operatively coupled to a word line, a gate control line, and a bit line. Each of the plurality of non-volatile memory cells comprises a first transistor, a second transistor, a first diode-connected transistor, and a capacitor. The first transistor, second transistor, first diode-connected transistor are coupled in series, with the capacitor having a first terminal connected to a common node between the first diode-connected transistor and the second transistor.Type: ApplicationFiled: September 24, 2021Publication date: October 13, 2022Applicant: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Perng-Fei Yuh, Tung-Cheng Chang, Gu-Huan Li, Chia-En Huang, Jimmy Lee, Yih Wang
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Patent number: 11450370Abstract: A memory device includes a plurality of memory cells. Each memory cell includes a multi-gate FeFET that has a first source/drain terminal, a second source/drain terminal, and a gate with a plurality of ferroelectric layers configured such that each of the ferroelectric layers has a respective unique switching E-field.Type: GrantFiled: April 13, 2021Date of Patent: September 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Perng-Fei Yuh
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Publication number: 20220263011Abstract: Magnetic random access memory (MRAM) cells are provided. MRAM cell includes a plurality of stacked magnetic tunnel junction (MTJ) devices coupled in serial, and a transistor. The transistor has a gate coupled to a word line, a first terminal coupled to a bit line through the stacked MTJ devices, and a second terminal coupled to a source line. The stacked MTJ devices have different sizes. Each of the stacked MTJ devices includes a free layer, a pinned layer and a barrier layer between the free layer and the pinned layer. The free layers of two adjacent stacked MTJ devices are in direct contact with each other.Type: ApplicationFiled: May 2, 2022Publication date: August 18, 2022Inventors: Perng-Fei YUH, Yih WANG
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Publication number: 20220199457Abstract: The present disclosure describes methods and systems for radical-activated etching of a metal oxide. The system includes a chamber, a wafer holder configured to hold a wafer with a metal oxide disposed thereon, a first gas line fluidly connected to the chamber and configured to deliver a gas to the chamber, a plasma generator configured to generate a plasma from the gas, a grid system between the plasma generator and the wafer holder and configured to increase a kinetic energy of ions from the plasma, a neutralizer between the grid system and the wafer holder and configured to generate electrons and neutralize the ions to generate radicals, and a second gas line fluidly connected to the chamber and configured to deliver a precursor across the wafer. The radicals facilitate etching of the metal oxide by the precursor.Type: ApplicationFiled: March 14, 2022Publication date: June 23, 2022Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chansyun David YANG, Chan-Lon YANG, Keh-Jeng CHANG, Perng-Fei YUH
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Patent number: 11322680Abstract: Magnetic random access memory (MRAM) cells are provided. An MRAM cell includes a plurality of stacked magnetic tunnel junction (MTJ) devices coupled in serial and a transistor. The transistor having a gate coupled to a word line, a first terminal coupled to a bit line through the stacked MTJ devices, and a second terminal coupled to a source line. The stacked MTJ devices are different sizes.Type: GrantFiled: May 27, 2020Date of Patent: May 3, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Perng-Fei Yuh, Yih Wang
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Patent number: 11276604Abstract: The present disclosure describes methods and systems for radical-activated etching of a metal oxide. The system includes a chamber, a wafer holder configured to hold a wafer with a metal oxide disposed thereon, a first gas line fluidly connected to the chamber and configured to deliver a gas to the chamber, a plasma generator configured to generate a plasma from the gas, a grid system between the plasma generator and the wafer holder and configured to increase a kinetic energy of ions from the plasma, a neutralizer between the grid system and the wafer holder and configured to generate electrons and neutralize the ions to generate radicals, and a second gas line fluidly connected to the chamber and configured to deliver a precursor across the wafer. The radicals facilitate etching of the metal oxide by the precursor.Type: GrantFiled: October 27, 2020Date of Patent: March 15, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chansyun David Yang, Chan-Lon Yang, Keh-Jeng Chang, Perng-Fei Yuh