Abstract: Methods, systems and apparatus for determining a proposed cost for use of sensor resources and selecting a method of processing of sensed data are presented. Such a method includes the steps of: predicting a state of an environment, obtaining at least one criterion related to the use of the sensor resources comprising one or more data sensors, determining the proposed cost for use of the sensor resources, acquiring the sensed data from the one or more data sensors, determining a characteristic of the sensed data, and selecting the method of processing the sensed data according to the determined characteristic and the predicted state. The at least one criterion is based upon the predicted state. The determining of the proposed cost is based on the at least one criterion. One or more of steps are implemented on the processor device.

Abstract: A technique for identifying a defect in an object produced by a controllable process is disclosed. A first type of data generated as a result of production of the object by the controllable process is obtained. A second type of data generated as a result of production of the object by the controllable process is obtained. The first type of data and the second type of data are jointly analyzed. A defect is identified in the object based on the joint analysis of the first type of data and the second type of data.

Abstract: A method includes parsing input from a requestor, where the input includes at least one of a query and a command that is parsed into a structured query having an indication of at least one data stream or set of data streams and at least one action to be performed on the at least one data stream or set of data streams. The method further includes mapping the structured query into a graph of processing elements that are selected and interconnected so as to execute the structured query; instantiating the graph of processing elements and connecting and initializing the instantiated graph of processing elements with an identified at least one data stream or set of data streams to receive data there from; and outputting a result of the structured query to the requestor.

Abstract: A technique for identifying a defect in an object produced by a controllable process. A first type of data generated as a result of production of the object by the controllable process is obtained. A second type of data generated as a result of production of the object by the controllable process is obtained. The first type of data and the second type of data are jointly analyzed. A defect is identified in the object based on the joint analysis of the first type of data and the second type of data. By way of example, the controllable process comprises a semiconductor manufacturing process such as a silicon wafer manufacturing process and the object produced by the semiconductor manufacturing process comprises a processed wafer. The first type of data comprises tool trace data and the second type of data comprises wafer image data. The tool trace data is generated by a photolithographic tool.

Abstract: A method includes parsing input from a requestor, where the input includes at least one of a query and a command that is parsed into a structured query having an indication of at least one data stream or set of data streams and at least one action to be performed on the at least one data stream or set of data streams. The method further includes mapping the structured query into a graph of processing elements that are selected and interconnected so as to execute the structured query; instantiating the graph of processing elements and connecting and initializing the instantiated graph of processing elements with an identified at least one data stream or set of data streams to receive data there from; and outputting a result of the structured query to the requestor.

Abstract: Methods, systems and apparatus for determining a proposed cost for use of sensor resources and selecting a method of processing of sensed data are presented. Such a method includes the steps of: predicting a state of an environment, obtaining at least one criterion related to the use of the sensor resources comprising one or more data sensors, determining the proposed cost for use of the sensor resources, acquiring the sensed data from the one or more data sensors, determining a characteristic of the sensed data, and selecting the method of processing the sensed data according to the determined characteristic and the predicted state. The at least one criterion is based upon the predicted state. The determining of the proposed cost is based on the at least one criterion. One or more of steps are implemented on the processor device.

Abstract: A technique for identifying a defect in an object produced by a controllable process. A first type of data generated as a result of production of the object by the controllable process is obtained. A second type of data generated as a result of production of the object by the controllable process is obtained. The first type of data and the second type of data are jointly analyzed. A defect is identified in the object based on the joint analysis of the first type of data and the second type of data. By way of example, the controllable process comprises a semiconductor manufacturing process such as a silicon wafer manufacturing process and the object produced by the semiconductor manufacturing process comprises a processed wafer. The first type of data comprises tool trace data and the second type of data comprises wafer image data. The tool trace data is generated by a photolithographic tool.

Abstract: A semiconductor wafer including a plurality of pits in the semiconductor wafer. The pits are arranged in an information-providing pattern and are readable after completion of processing on the wafer.

Abstract: A method for employing a plurality of reusable reticles in an integrated circuit manufacturing process employing lithographic exposure of a semiconductor wafer. Initially there is provided a matrix of a plurality of reticles, each matrix comprising a plurality of tuples of reticles, each reticle tuple comprising one or more reticles. The method then includes defining at least one set of valid groups of reticles in the matrix for use in a desired lithographic exposure process, defining a set of conditions for determining availability of all reticles in the valid groups in the lithographic exposure process, and comparing the availability conditions to the reticles in the set of valid groups and eliminating valid groups which do not meet the availability conditions, leaving non-eliminated valid groups.

Abstract: A method of remotely monitoring and controlling a manufacturing facility through a manufacturing execution system (MES) uses wireless devices connected to a web server through a transcoding proxy. The wireless devices, such as portable digital assistants or cell phones, request information about the manufacturing process from the web server by requesting web pages containing the desired information. The web pages are modified by the transcoding proxy so that they may be correctly displayed on the screen of the wireless device. The MES can also be controlled by a wireless device. The wireless device passes control commands through the transcoding proxy to the web server, which sends them to the MES to control production in the manufacturing facility.

Abstract: A method for employing a plurality of reusable reticles in an integrated circuit manufacturing process employing lithographic exposure of a semiconductor wafer. Initially there is provided a matrix of a plurality of reticles, each matrix comprising a plurality of tuples of reticles, each reticle tuple comprising one or more reticles. The method then includes defining at least one set of valid groups of reticles in the matrix for use in a desired lithographic exposure process, defining a set of conditions for determining availability of all reticles in the valid groups in the lithographic exposure process, and comparing the availability conditions to the reticles in the set of valid groups and eliminating valid groups which do not meet the availability conditions, leaving non-eliminated valid groups.

Abstract: A system is provided for controlling the time at which a durable item, such as a reticle used in a lithography process in semiconductor manufacturing, is requalified for use. A counting device counts occurrences of predefined events, such as the number of jobs in which the reticle is used or the number of times it is placed in a lithography tool. The reticle is not removed from use until a limiting number of jobs or tool placements is reached, or the reticle is needed for processing the requalification job. The system also includes a requalification device for the durable item.

Abstract: A manufacturing control system used in the manufacture of semiconductor products. The system has a custom business logic controller which can be used to define and implement custom business logic that departs from the conventional business logic associated with the several elements of the manufacturing control system both rapidly and in real time. The custom business logic controller is implemented by defining desired business logic within the definitional environment of the controller. Where custom business logic is required, the manufacturing control system operates to activate the custom business logic controller, which then proceeds to execute the desired (custom) series of business logic units. Within this series, the custom business logic controller can execute a continuous series of business logic units, or certain business logic units can be executed conditionally, based on the success or failure of a prior business logic unit or units, or based on some other environmental condition.

Abstract: A method for migrating legacy applications into a new software product architecture using a functional conversion module located within a system controller. The functional conversion module comprises a migration plan shut off. The functional conversion module further comprises three paths or branches through which a functional request can be routed. Functional requests which are not identified in the migration plan are routed through the first path and the functional request is sent to the pre-existing software and executed as requested. Functional requests identified in the migration plan for which the pre-existing software is in control are routed through the second path, and the functional request is sent to the pre-existing software and executed as received. In the background, the functional request is translated for the new software and sent to the new software and executed.

Abstract: In a manufacturing line having a plurality of production jobs performed on a plurality of production units in a plurality of processing areas, a method and related system for selecting a number of production units to be sent to a designated process area other than the plurality of processing areas.

Abstract: A system monitors usage of a tool in a tool set and warns an operator and/or prevents usage of a tool chosen by an operator, subject to possible override by the operator, if permitted, in order to balance usage among tools of the tool set and verify operational conditions of tools of the tool set through usage. The system and method are entirely transparent to the operator and the operator is permitted full flexibility of tool choice unless tool usage becomes unbalanced. The system and method preferably limits usage based on length of consecutive usage and percentage of product processed by each tool. Use of new, modified or repaired tools is also prevented until the tool is certified for a particular process and defined to the system.