Patents by Inventor Pete S. Erbach

Pete S. Erbach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High quality lithographic processing
    Publication number: 20020045105
    Abstract: Lithographic processes utilized for fabrication of micro-machines have been heretofore been plagued by stitching errors and errors arising from the roughness of the surface of the photosensitve material. These errors can be minimized by the utilization of multi-pass exposure techniques to minimize the stitching errors. The surface roughness errors are minimized by a thermal treatment of the surface of the photosensitive material that leaves the bulk of the photosensitve material undisturbed.
    Type: Application
    Filed: July 2, 2001
    Publication date: April 18, 2002
    Inventors: David R. Brown, Gregg T. Borek, Randy Lindsey, Pete S. Erbach