Abstract: An apparatus and a method for the analysis of the surface of a specimen by the techniques of electron energy spectroscopy and secondary ion time-of-flight mass spectrometry. The apparatus provides a substantially conventional electron energy analyzer, typically having hemispherical electrodes. The energy analyzer is used as an ion deflector and in conjunction with a linear drift region and a pulsed primary ion beam gun provides a time-of-flight mass spectrometer having at least first-order time focusing properties. By using the energy analyzer in both techniques a combined instrument is provided at much lower cost than prior combined instruments which comprise different analyzers for the two techniques.

Abstract: There is provided an electron spectrometer operable to produce an image of an electron emitting surface, said spectrometer comprising in sequence:(a) means for causing electrons to be emitted from said surface;(b) a first electrostatic lens system arranged to project at least some of said electrons onto a first diffraction plane as a Fourier transform of an electron image of at least a part of said surface;(c) a torroidal capacitor type electrostatic energy analyzer having an object plane and conjugate thereto a first image plane, said analyzer being disposed with said object plane coincident with said first diffraction plane and being arranged to project electrons of said Fourier transform as an energy dispersed Fourier transform in said first image plane;(d) energy selection means for transmitting electrons of said energy dispersed Fourier transform having energies only within a selected range; and(e) a second electrostatic lens system arranged to receive electrons transmitted by said energy selection means

Abstract: There is provided an electron spectrometer operable to produce an image of an electron emitting surface, said spectrometer comprising in sequence:(a) means for causing electrons to be emitted from said surface;(b) a first electrostatic lens system arranged to project at least some of said electrons onto a first diffraction plane as a Fourier transform of an electron image of at least a part of said surface;(c) a torroidal capacitor type electrostatic energy analyzer having an object plane and conjugate thereto a first image plane, said analyzer being disposed with said object plane coincident with said first diffraction plane and being arranged to project electrons of said Fourier transform as an energy dispersed Fourier transform in said first image plane;(d) energy selection means for transmitting electrons of said energy dispersed Fourier transform having energies only within a selected range; and(e) a second electrostatic lens system arranged to receive electrons transmitted by said energy selection means