Patents by Inventor Peter A. DiFonzo

Peter A. DiFonzo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of fabricating a semiconductor capacitor
    Patent number: 10224392
    Abstract: A method of fabricating a semiconductor capacitor is disclosed. The method includes forming a first trench in a semiconductor substrate, forming a dielectric lining layer in the first trench, and depositing a first capacitor conductor plate layer on the dielectric lining layer. The method also includes forming a second trench such that the dielectric lining layer is exposed. The method also includes forming a third trench such that the dielectric lining layer is exposed within the third trench. The method also includes depositing a second capacitor conductor plate layer in the second trench and depositing a third capacitor conductor plate layer in the third trench. The method also includes forming a first electrical contact between the first capacitor conductor plate layer and the second capacitor conductor plate layer and forming a second electrical contact between the first capacitor conductor plate layer and the third capacitor conductor plate layer.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: March 5, 2019
    Assignee: The United States of America as represented by the Director, National Security Agency
    Inventor: Peter A. DiFonzo