Abstract: A bulge testing system (10) for testing the material properties of a thin film window (14) using a Michelson interferometer (18) that generates an interference pattern (32) having fringes (34) and nodes (36) that move as the thin film window is inflated or deflated. The bulge testing system includes a fringe counting module (82), an analysis module (114) and an output module (88). The fringe counting module allows a user to interactively select from an image of the interference pattern one or more sampling regions (30) in which the user interface will count fringes. The analysis module allows a user to interactively change the location of maxima/minima indicators (116) in the event that noise in the image causes the analysis module to incorrectly determine the locations of the fringes and nodes. The output module automatically calculates material properties and provides test results to an output file and/or a results window (168).

Abstract: A bulge tester (20) for determining residual stresses, and mechanical, thermal and other properties of a thin film (26) of material. The bulge tester includes a chuck (22) that supports the substrate (24) on which the film is deposited by stiction rather than through the use of mounting waxes, adhesives and mechanical clamping. The stiction inducing media (52) may be viscous grease, a flexible sheet of material such as a rubber, an elastomer, both or other materials. Bulge testing performed using the stiction-based chuck involves inducing stiction between the base (42) of the chuck and substrate of at least at least 1 kPascal (0.69 lb/in2), as determined using a corner peel test. The pressurized fluid is delivered to the film to be tested, and materials properties of the film are determined as a function of pressure of the fluid and deflection of the film.

Abstract: A bulge testing system (10) for testing the material properties of a thin film window (14) using a Michelson interferometer (18) that generates an interference pattern (32) having fringes (34) and nodes (36) that move as the thin film window is inflated or deflated. The bulge testing system includes a fringe counting module (82), an analysis module (114) and an output module (88). The fringe counting module allows a user to interactively select from an image of the interference pattern one or more sampling regions (30) in which the user interface will count fringes. The analysis module allows a user to interactively change the location of maxima/minima indicators (116) in the event that noise in the image causes the analysis module to incorrectly determine the locations of the fringes and nodes. The output module automatically calculates material properties and provides test results to an output file and/or a results window (168).

Abstract: A bulge tester (20) for determining residual stresses, and mechanical, thermal and other properties of a thin film (26) of material. The bulge tester includes a chuck (22) that supports the substrate (24) on which the film is deposited by stiction rather than through the use of mounting waxes, adhesives and mechanical clamping. The stiction inducing media (52) may be viscous grease, a flexible sheet of material such as a rubber, an elastomer, both or other materials. Bulge testing performed using the stiction-based chuck involves inducing stiction between the base (42) of the chuck and substrate of at least at least 1 kPascal (0.69 lb/in2), as determined using a corner peel test. Then pressurized fluid is delivered to the film to be tested, and materials properties of the film are determined as a function of pressure of the fluid and deflection of the film.