Patents by Inventor Peter Abenthung

Peter Abenthung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9890451
    Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 ?m. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.
    Type: Grant
    Filed: December 2, 2011
    Date of Patent: February 13, 2018
    Assignee: Plansee SE
    Inventors: Peter Abenthung, Karl Huber, Harald Lackner, Gerhard Leichtfried, Peter Polcik, Christian Weratschnig
  • Patent number: 8900340
    Abstract: A tubular target is formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 ?m. The molybdenum or molybdenum alloy tube may be produced by extrusion and it is formed with walls having a wall thickness that increases towards the ends of the tube. The molybdenum tube has a backing tube of titanium or titanium alloy that is attached inside with a material bond connection. Alternatively, the backing tube is formed of austenitic steel or a copper alloy.
    Type: Grant
    Filed: December 2, 2011
    Date of Patent: December 2, 2014
    Assignee: Plansee SE
    Inventors: Peter Abenthung, Karl Huber, Harald Lackner, Gerhard Leichtfried, Peter Polcik, Christian Weratschnig
  • Publication number: 20140238850
    Abstract: A tubular target is formed of refractory metal or a refractory metal alloy. The target has at least one tubular portion X with a relative density RDx and at least one tubular portion Y with a relative density RDy. At least one tubular portion X has, at least in some regions, a larger outer diameter than a tubular portion Y at least in some regions. A density ratio satisfies the relation (RDy?RDx)/RDy?0.001. There is also described a method for producing a tubular target from refractory metal or refractory metal alloy by sintering and local deformation of different degree. The tubular target has a more uniform sputter removal over the entire surface area compared with prior tubular targets. The tubular targets do not exhibit any tendency to arcing or to particle regeneration.
    Type: Application
    Filed: October 17, 2012
    Publication date: August 28, 2014
    Applicant: Plansee SE
    Inventors: Peter Abenthung, Christian Linke, Andre Dronhofer, Hartmut Wolf, Tobias Will, Wolfgang Koeck
  • Publication number: 20120073958
    Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 ?m. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.
    Type: Application
    Filed: December 2, 2011
    Publication date: March 29, 2012
    Applicant: PLANSEE SE
    Inventors: PETER ABENTHUNG, KARL HUBER, HARALD LACKNER, GERHARD LEICHTFRIED, PETER POLCIK, CHRISTIAN WERATSCHNIG
  • Publication number: 20120073959
    Abstract: A tubular target is formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 ?m. The molybdenum or molybdenum alloy tube may be produced by extrusion and it is formed with walls having a wall thickness that increases towards the ends of the tube. The molybdenum tube has a backing tube of titanium or titanium alloy that is attached inside with a material bond connection. Alternatively, the backing tube is formed of austenitic steel or a copper alloy.
    Type: Application
    Filed: December 2, 2011
    Publication date: March 29, 2012
    Applicant: PLANSEE SE
    Inventors: PETER ABENTHUNG, KARL HUBER, HARALD LACKNER, GERHARD LEICHTFRIED, PETER POLCIK, CHRISTIAN WERATSCHNIG
  • Publication number: 20070086909
    Abstract: A method for producing a tubular target formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 ?g/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 ?m and which is connected to a supporting tube. The molybdenum or molybdenum alloy tube is produced by extrusion.
    Type: Application
    Filed: October 16, 2006
    Publication date: April 19, 2007
    Inventors: Peter Abenthung, Karl Huber, Harald Lackner, Gerhard Leichtfried, Peter Polcik, Christian Weratschnig