Abstract: The present invention relates to a SOG (Spin-On-Glass) dispensing system and its controlling sequences and, more particularly, to a SOG dispensing system allowing for continuous production and its controlling sequences According to the present invention, a buffer tank, whose wall is set a plurality of level sensors at different level heights, is connected between a source tank with a SOG bottle inside and a coating unit of prior art and then SOG is supplied for a time interval from the source tank into the buffer tank by control signals from these level sensors. Besides, the buffer tank is surrounded with a cooling unit to provide a low temperature enviroment allowing for prolonging life time of SOG and preventing organic solvent inside SOG from evaporating and then crystallizing to form contamination particles at wall of the SOG dispensing system.