Abstract: An imprint lithography apparatus is disclosed, the apparatus including a substrate table arranged to support a substrate having a first surface to be imprinted and a second surface, facing the substrate table, comprising a substrate alignment mark, a template holder arranged to hold a template to imprint the first surface of the substrate, and an alignment system arranged to align the template to a substrate alignment mark provided on the substrate, wherein the substrate table further comprises a substrate table optical system to allow the substrate alignment mark to be viewed by the alignment system.

Abstract: A method of pre-aligning a substrate in a lithographic apparatus is described. The substrate has at least one alignment mark provided on a side of the substrate. The method includes determining a relationship between a position of the at least one alignment mark, at least part of an edge of the substrate, and a center of the substrate. A substrate support is provided to support a substrate, the substrate support having at least one optical view window at a predetermined location to view a part of the side of the substrate. The substrate is placed on the substrate support on the basis of the relationship to position the at least one alignment mark in the at least one optical view window.

Abstract: A substrate bonding system has a first and a second substrate table for holding a first substrate and a second substrate, respectively, and a controller. The first substrate includes a first device having first contact pads and the second substrate a second device having second contact pads. The wafer bonding system is arranged to bond the first and second device in such a way that a circuit may be formed by the first and second device. The first and second substrate tables each include a position sensor arranged to measure an optical signal generated on an alignment marker of the first and second substrate, respectively. The first and second substrate tables include a first and second actuator respectively that is arranged to alter a position and orientation of the respective substrate table.

Abstract: A particulate pre-reduction cobalt supported Fischer-Tropsch synthesis catalyst precursor which comprises a catalyst support impregnated with cobalt, is treated with a pure hydrogen reducing gas, at a first specific feed gas space velocity, SV1, and at a first heating rate, HR1, to obtain a partially reduced precursor. The support contains reducible cobalt oxide in a calcined state and having a formula-unit in which each mole of cobalt atoms is associated with more than 4/3 moles of oxygen atoms and displaying a reducible cobalt oxide specific surface area at least equal to that of Co3O4 spinel. The partially reduced precursor is then treated with a pure hydrogen reducing gas, at a second specific feed gas space velocity, SV2, and at a second heating rate, HR2, to obtain an activated supported Fischer-Tropsch catalyst, with SV2?SV1 and/or HR2?HR1; however, when SV2=SV1, HR2?HR1 and when HR2=HR1, SV2?SV1.

Abstract: In a method according to one embodiment of the invention, a plurality of markers are printed in resist on a substrate at a range of angles relative to a crystal axis of the substrate. The markers are etched in to the substrate using an anisotropic etch process, such that after the etch the apparent positions of the markers are dependent on their orientation relative to the crystal axis. The apparent positions of the markers are measured, and from this information the orientation of the crystal axis is derived.

Abstract: A muffler arrangement includes a muffler with an essentially cylindrical housing having a face end with a central entrance opening and at least one exit opening arranged other than centrally on the face end. Baffles are disposed within the housing, the baffles being concentrically arranged pipe cylinders which extend alternatingly into one another and are closed at one end, for effecting a multiple deflection of gases traveling from the central entrance opening to the at least one exit opening. A coupling structure is secured to the muffler housing, for carrying the muffler in an operating position. The coupling structure has a central passage for connecting the muffler to an exhaust outlet of a machine, and has an other than central channel, surrounding the central passage, for connection to an exhaust gas output conduit for outputting exhaust gases from the muffler arrangement.

Abstract: The invention relates to a dry-running vacuum pump (1) with at least one vertically disposed shaft (2, 3) which is mounted in an upper bearing plate (14) by means of a lubricated rolling bearing (27) situated in an open-topped pot-like component (51); in order to reduce the number of gaps in the area of this bearing (27) it is proposed that with the open-topped pot-like component (51) there be associated an open-bottomed pot-like component (54) fastened to the housing, the wall (55) of which reaches into the pot-like component (51) on the shaft, the rolling bearing's ring (62) that is fixed to the housing being supported on the inside of the said wall.

Abstract: A vacuum pump includes a first pump housing defining a pumping chamber; a pump rotor received in the pumping chamber; a drive motor operatively connected to the pump rotor; an oil casing receiving the first pump housing; and a second pump housing surrounding the first pump housing and the drive motor.

Abstract: The invention refers to a multiple connection of rotation vacuum pumps having a common housing and drive motor. The vacuum pumps arranged in two rows. Each one of the vacuum pumps has a pump gear, and these gears, together with a drive gear, are arranged such that they form a single row with their teeth drivingly intermeshed. Preferably only inner parts of the pump are located in the housing.

Abstract: A method and apparatus for delivering oil into a pump chamber of a high-vacuum stage of a multi-stage pump. The method includes the steps of sensing a first pressure at an intake region of the high-vacuum stage of the pump, and sensing a second pressure at a discharge region of the high-vacuum stage of the pump. Oil is delivered to the high-vacuum stage of the pump in response to a pressure difference between the first and second pressures. Increased quantities of oil are delivered to the high-vacuum stage of the pump when the pressure difference exceeds a predetermined value. A gas ballast may also be delivered to the high-vacuum stage of the pump when the pressure difference exceeds this predetermined value. The apparatus may include a diaphragm valve including a diaphragm mounted between subchambers that are respectively in fluid communication with the intake and discharge regions of the high-vacuum stage of the pump.

Abstract: The invention is directed to a method for the operation of a twin shaft vacuum pump (1) having two rotors (4, 5; 6, 7; 8, 9) that rotate synchronously and in non-contacting fashion in a pump chamber, each being provided with a respective projection (38) and a recess (39), the one of said rotors controlling an admission opening (32, 35) and the other controlling a discharge opening (33, 37, 42); the invention is also directed to a twin shaft vacuum pump suitable for the implementation of the method; in order to be able to admit flushing gas into a twin shaft vacuum of this species during operation as well, it is proposed that flushing gas be admitted into the respectively diminishing pump volume via an orifice (45) that is controlled such by the rotor at the discharge side that the respective pump volume is closed both toward the admission opening (35) as well as toward the discharge opening (42) at the moment the flushing gas is supplied.

Abstract: A twin-shaft vacuum pump including a rotor pair mounted for rotation in a pump chamber. The rotor pair together with the chamber wall define a suction side and delivery side of the pump chamber. In order to prevent solid particles suspended in pump fluid from settling in the chamber, the invention provides a flushing gas outlet orifice disposed on the delivery side of the pump chamber and adapted to be connected to a source of flushing gas. The solid particles can thus be held in suspension and conveyed from the pump with the assistance of flushing gas supplied through the orifice.

Abstract: The invention refers to a multiple connection of rotation vacuum pumps having a common housing and drive motor. The vacuum pumps arranged in two rows. Each one of the vacuum pumps has a pump gear, and these gears, together with a drive gear, are arranged such that they form a single row with their teeth drivingly intermeshed. Preferably only inner parts of the pump are located in the housing.

Abstract: A twin-shaft vacuum pump includes a pump chamber, a pair of rotary pistons disposed in the pump chamber, and plates which laterally delimit the pump chamber, and a housing ring which peripherally delimits the pump chamber. In order to increase the ability of the pump to withstand thermal stresses, the housing ring and the rotary pistons are made of different materials, with the coefficient of expansion of the piston material being lower than the coefficient of expansion of the housing material. Other improvements include cooling of the lateral end plates, cooling of the rotors, and the provision of sleeves which serve to fix the position of the rotors on the shafts and which are composed of a material whose coefficient of expansion is lower than that of the rotor material.

Abstract: A multistage vacuum pump with a case with at least two pump chambers in the case, and with at least one passage connecting the pump chambers together. To detect fouling in the especially sensitive connecting passages in a simple manner, it is proposed to configure the passages as part of bores leading to the outside, which can be closed with a plug.

Abstract: A twin-shaft vacuum pump having a pair of shafts, at least one pump chamber, a pair of rotors disposed in the or in each pump chamber and mounted on the shafts, and housing members defining the pump chamber or chambers, a synchronization mechanism composed of two gears disposed in a side chamber, a drive motor, and a transmission mechanism connecting the drive motor to one of the shafts. In order to simplify installation and servicing of the pump, the shafts are mounted vertically. The side chamber, synchronization mechanism, and transmission mechanism are disposed below the lower rotor pair.

Abstract: A filter cartridge for cleaning oil of an oil sealed vacuum pump which comprises a cartridge housing, the cartridge housing being releasably mounted to the vacuum pump; filter materials including at least two types of filters having different characteristics, the filter materials including the filters being disposed in the cartridge housing.

Abstract: Disclosed is a system for separating impurities from a hydrogen-free fluorinated lubricant. The lubricant is passed through a filter apparatus containing an adsorbing material. The lubricant is then passed into a degasser unit to remove volatile impurities from the lubricant. The degassing unit has an area of closed suction. A pressure measuring device measures the pressure in the closed area and, based on this measurement, a control apparatus controls the degassing unit. A monitoring unit monitors the quality of the filtered lubricant.

Abstract: A vacuum pump and trap combination in which the trap is configured in the manner of a siphon and comprises a tube immersed in trap liquid but having an opening lying above the trap liquid level. The tube has a wall section lying below the trap liquid level and having perforations therein to admit different amounts of trap liquid in relation to the rate of discharge gas flow, thereby preventing frothing of the trap liquid.

Abstract: An oil-sealed vacuum pump has an oil circuit which has an externally located oil filter that may be operatively connected to or disconnected from the oil circuit by a coupler. The coupler has a rotatably supported valve disc having a first face oriented towards oil circuit ports in the pump and a second face oriented towards the filter. The valve disc further has spaced first and second apertures passing therethrough and a groove provided in the first face and oriented approximately perpendicularly to an imaginary line connecting the first and second apertures with one another.