Abstract: In a process of making a microstructured plastic mold from which structures can be formed galvanically a compound layer including an electrically conductive and an insulating layer portion is provided and is heated, and impressed into the insulating layer portion is a tool which has microstructured bodies disposed thereon of a height corresponding at least to the thickness of the insulating layer portion and with rough front surfaces having points and ridges adapted to penetrate the electrically insulating layer thereby to expose the electrically insulating layer at the bottom of the cavities formed by microstructured bodies.

Abstract: In a process for producing microstructure components on a substrate which carries electronic microcircuits cooperating functionally with the microstructure components, a first layer of a plastic material which connects with the substrate is applied to the substrate and a second layer of a plastic material which includes a separating agent but which firmly connects with the first layer is applied to the first layer and a molding tool is then impressed into the second layer to form the desired microstructures or to form cavities into the plastic material, which, upon removal of the molding tool, are filled with a metal to form the desired microstructures on the substrate upon removal of the plastic material.

Abstract: For a process of making a microstructured plastic mold from which structures can be formed galvanically, a compound layer, including an electrically conductive and an insulating layer portion, is provided and is heated and impressed into the insulating layer portion, a tool is provided which has microstructured bodies disposed thereon of a height corresponding at least to the thickness of the insulating layer portion and with rough from surfaces having points and ridges adapted to penetrate the electrically insulating layer thereby to expose the electrically insulating layer at the bottom of the cavities formed by microstructured bodies.

Abstract: A method of producing microstructures having regions of different structural height includes providing a layer of positive resist material that is sensitive to X-ray radiation with microstructures on a side facing a source of X-rays. Using a mask, the layer of a positive resist material is partially irradiated with the X-rays. The irradiated regions are removed with the aid of a developer.

Abstract: The invention relates to a method of producing microstructured metallic bodies in which plastic negative molds of the microstructures are produced on an electrically conductive base plate by means of electron beam lithography, X-ray lithography or a micromolding technique. Cavities of the negative molds are filled with metal by electroplating while employing the electrically conductive base plate as an electrode. In the course of producing the negative molds, a residual plastic layer is left at the bottom of the cavities of the negative molds on the electrically conductive base plate. Also, before the cavities of the negative molds are filled with metal by electroplating, the residual plastic layer at the bottom of the cavities is removed by means of reactive ion etching with ions that are accelerated perpendicularly toward the surface of the base plate.

Abstract: A process for the separation of light additive gas at the end of and/or at the location of the change in stage sizes in a separating nozzle cascade which is operated with a mixture of gaseous or vaporous substances to be separated. The separation of the light additive gas is effected by using a separating nozzle stage. A double deflection separating nozzle is employed as the separating nozzle stage.

Abstract: In order to separate gaseous or vaporous substances having different molecular weights and/or different gas kinetically effective cross sections, by conducting the mixture to be separated together with a lighter additive gas into a separating chamber through two slit-shaped nozzles to form, in the chamber, two jets which are directed toward, and deflect, one another, the flow lines of each jet converging in the flow direction, dividing the thus deflected jets by means of separating baffles into partial streams of respectively different compositions, and discharging the partial streams separately from the chamber.

Abstract: In a method for separating a gaseous or vaporous mixture into components having different molecular weights and/or different gas kinetically effective cross sections by conducting the mixture through a nozzle into a separating chamber and deflecting the mixture in the chamber by mutual jet deflection, dividing the deflected mixture into partial streams having respectively different compositions by means of at least one separating baffle which protrudes into the mixture flow path, and separately removing the partial streams, the mixture is conducted through the nozzle by being distributed substantially uniformly around the axis of the separating chamber by being fed into the chamber from all sides thereof in radial directions along a plane, and the partial streams are removed by causing at least the lightest partial stream to flow radially out of the separating chamber substantially uniformly around the axis of the separating chamber and in a plane approximately parallel with the plane along which the mixture