Patents by Inventor Peter BRAKHAGE

Peter BRAKHAGE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Image sensor for immersion lithography
    Patent number: 11774868
    Abstract: An image sensor for immersion lithography, the image sensor including: a grating; an absorber layer on the grating, the absorber layer configured to absorb radiation; and a liquidphobic coating at an upper surface of the image sensor, wherein a protective layer is provided between the absorber layer and the liquidphobic layer, the protective layer being less reactive than the absorber layer to an immersion liquid.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: October 3, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Nirupam Banerjee, Johan Franciscus Maria Beckers, Peter Brakhage, Arend Johannes Donkerbroek, Daniel Grimm, Tim Rathje, Martin Tilke, Sandro Wricke
  • IMAGE SENSOR FOR IMMERSION LITHOGRAPHY
    Publication number: 20220163896
    Abstract: An image sensor for immersion lithography, the image sensor including: a grating; an absorber layer on the grating, the absorber layer configured to absorb radiation; and a liquidphobic coating at an upper surface of the image sensor, wherein a protective layer is provided between the absorber layer and the liquidphobic layer, the protective layer being less reactive than the absorber layer to an immersion liquid.
    Type: Application
    Filed: April 7, 2020
    Publication date: May 26, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Nirupam BANERJEE, Johan Franciscus Maria BECKERS, Peter BRAKHAGE, Arend Johannes DONKERBROEK, Daniel GRIMM, Tim RATHJE, Martin TILKE, Sandro WRICKE