Patents by Inventor Peter Breitschopf

Peter Breitschopf has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for two-dimensional profiling of doping profiles of a material sample with scanning capacitance microscope
    Patent number: 7788732
    Abstract: A method and an apparatus is disclosed for two-dimensional profiling of doping profiles of a material sample with scanning capacitance microscope. A scanning of a two-dimensional structure of a dielectric or partially dielectric material sample with a tip of a probe of the scanning microscope is carried out. The change in capacitance during the scanning motion of the probe from one position on the material sample to the next is measured. Finally, an evaluation of the change in capacitance during the scanning motion of the probe from one position on the material sample to the next as a current is carried out.
    Type: Grant
    Filed: March 22, 2007
    Date of Patent: August 31, 2010
    Assignee: Infineon Technologies AG
    Inventors: Guenther Benstetter, Peter Breitschopf, Bernard Theo Knoll
  • Method and apparatus for two-dimensional profiling of doping profiles of a material sample with scanning capacitance microscope
    Publication number: 20070221841
    Abstract: A method and an apparatus is disclosed for two-dimensional profiling of doping profiles of a material sample with scanning capacitance microscope. A scanning of a two-dimensional structure of a dielectric or partially dielectric material sample with a tip of a probe of the scanning microscope is carried out. The change in capacitance during the scanning motion of the probe from one position on the material sample to the next is measured. Finally, an evaluation of the change in capacitance during the scanning motion of the probe from one position on the material sample to the next as a current is carried out.
    Type: Application
    Filed: March 22, 2007
    Publication date: September 27, 2007
    Applicant: Infineon Technologies AG
    Inventors: Guenther Benstetter, Peter Breitschopf, Bernhard Theo Knoll