Patents by Inventor Peter Buechel

Peter Buechel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputter source with a target arrangement and a holding device
    Patent number: 5833823
    Abstract: A sputter source and a corresponding target and holding device are provided in which the target is held by form locking arrangements. The target is pushed in an x-direction in the manner of a sliding drawer and is fixed by a releasable lock. A foil, which defines a cooling system on the holding device side, braces the fixed target when the cooling system is acted upon by pressure.
    Type: Grant
    Filed: November 20, 1995
    Date of Patent: November 10, 1998
    Assignee: Balzers Aktiengesellschaft
    Inventors: Pius Gruenenfelder, Peter Buechel, Klaus Leitner, Walter Haag