Patents by Inventor Peter C. Shamshoian

Peter C. Shamshoian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for borosilicate glass films for multilevel metallization structures in semiconductor devices
    Patent number: 4891247
    Abstract: A process for forming a borosilicate glass layer on a sharply profiled surface of a semiconductor device comprising the steps of: heating the device; conveying the device through a deposition chamber at atmospheric pressure; directing silane gas, diborane gas, and oxygen into the chamber and the surface of the heated device where they react and form a borosilicate glass layer on the surface so that smooth corners are formed for the sharply profiled surface of the semiconductor device.
    Type: Grant
    Filed: June 29, 1988
    Date of Patent: January 2, 1990
    Assignee: Watkins-Johnson Company
    Inventor: Peter C. Shamshoian