Patents by Inventor Peter Carleson

Peter Carleson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Subsurface imaging using an electron beam
    Publication number: 20060219953
    Abstract: A method of navigating or endpointing a microscopic structure by subsurface imaging using a beam of electrons having sufficient energy to penetrate the surface and produce a subsurface image. For endpointing, when the subsurface image become relatively clear at a known electron energy, a user knows that he is approaching the buried feature. For navigating, a subsurface image can be formed of fiducials or other features to determine the position of the beam on the device.
    Type: Application
    Filed: April 4, 2005
    Publication date: October 5, 2006
    Applicant: FEI Company
    Inventor: Peter Carleson