Abstract: A system and method for counting opaque particles within a fluid sample. The system uses an optical lens system to focus a light beam onto a sample on a multi-dimensional translation stage. The translation stage is moved in a pattern such that the intensity of the transmitted light is measured as a function of path length. A photo detector is used to measure the transmitted light through the sample. An analog-to-digital converter quantifies the transmitted light intensity. Changes in light intensity along the path length are correlated with the detection of an opaque particle. Data processing algorithms are implemented to automatically determine the background noise level associated with the acquired data and to set a discriminator level above which a particle is registered. The total number of particles and an areal density is reported along with an estimate of the uncertainty.

Abstract: A method for determining analyte concentration levels is provided. The method includes acquiring radiation scattered off or transmitted by a target, analyzing at least a first portion of the radiation via a first technique to generate a first measurement of analyte concentration levels, and analyzing at least a second portion of the radiation via a second technique to generate a second measurement of analyte concentration levels. The method further determines analyte concentration levels based on at least one of the first measurement or the second measurement. In addition, a system for implementing the method and a probe for measuring and monitoring the analyte concentration levels is provided.

Abstract: Gas delivery devices for PECVD systems and methods for using such systems are described. The delivery device goes directly through the powered electrode and thereby bypasses components of the PECVD systems used to support that electrode. The delivery device contains a coupling device between the powered electrode of the PECVD reactor and the gas inlet line. The gas inlet line is electrically and thermally isolated from the powered electrode and is sealed to maintain the vacuum integrity of the PECVD reactor through the use of a coupling device. Thus, gases from the heated gas lines can be routed directly through the powered electrode and fed into the reactor via the showerhead without having a cold area between the showerhead and gas inlet line.