Abstract: In the measurement of properties of a wafer substrate, such as Critical Dimension or overlay a sampling plan is produced defined for measuring a property of a substrate, wherein the sampling plan comprises a plurality of sub-sampling plans. The sampling plan may be constrained to a predetermined fixed number of measurement points and is used to control an inspection apparatus to perform a plurality of measurements of the property of a plurality of substrates using different sub-sampling plans for respective substrates, optionally, the results are stacked to at least partially recompose the measurement results according to the sample plan.

Abstract: A charged particle microscope for imaging a specimen. The charged particle microscope includes a specimen holder movable into an imaging position intersecting an optical axis, a specimen chamber configured to receive the specimen holder in the imaging position, and a sorption pump disposed in the specimen chamber and configured to lower a pressure in the specimen chamber.

Abstract: A differentiation system for differentiating cells includes an input device configured to receive holographic image data of a microscopic particle in suspension, holographic image data processing logic for converting the holographic image data to the frequency domain by performing a Fourier transform of the holographic image data, and a recognizer configured to determine characterization features of the holographic image data of the microscopic particle in the frequency domain for characterization of the microscopic particle, the characterization features comprising rotationally invariant features.

Abstract: A light emitting device (1) comprising at least one light source (2) adapted for, in operation, emitting light (7, 9), at least one free-shape refractive lens element (3) configured to aim light (7) emitted by the at least one light source (2) in a first direction towards a surface (22) to be illuminated by the light emitting device (1), the lens element (3) comprising a first end (11) adapted for facing in a direction towards the surface (22) and a second end (20) adapted for facing in a direction away from the surface (22), at least one first TIR element (4), the first TIR element (4) being a collimating TIR element configured to collimate and redirect light (9) emitted from the at least one light source (2) in a second direction away from the surface (22) into light (9) propagating parallel and in a downward direction, the first TIR element (4) comprising a light incoupling surface (19) and a light outcoupling surface (13), the light incoupling surface (19) being arranged at the second end (20) of the lens

Abstract: A device suitable for the detection and/or characterization of target particles in a fluid is disclosed. The device comprises: at least one heating element for heating and/or measuring a temperature, the heating element comprising a core comprising at least one electrically conducting portion, an electric isolating layer provided at a surface of the core and electrically isolates the core from the sample, and a plurality of binding sites at/to which target particles can bind. The device further comprising a processing means configured to measure an electric output of the least one heating element, a change of the electric output of the at least one heating element and/or its heating power and for deriving, based thereon, a characteristic of the target particles.

Abstract: A wearable electronic user device comprising a processor, a touch-sensitive display and a timer is disclosed. The device can be used to register disease-related states of the user. The processor is configured to generate a scoring scale comprising at least three distinct scores concerning disease-related states of the user. The touch-sensitive display is configured to display the scoring scale as generated by the processor enabling a user interaction with the scoring scale. The timer is configured for generating timing information for registering timing instances associated with the detected user interaction. The processor is configured for detecting the user interaction with the touch-sensitive display on or nearby the scoring scale to assign scoring information to the detected user interaction by associating the user interaction with one of the distinct scores.

Abstract: A molten metal pump comprised of a metal base defining a pumping chamber is provided. The pump further includes a motor mount adapted to receive a motor, at least one metal post extending between the base and the motor mount, and a metal shaft disposed between the motor and an impeller disposed in the pumping chamber. A bearing ring engages the impeller. The pumping chamber will include an inlet and an outlet. A steel riser tube in fluid communication the outlet is also provided.

Abstract: A device suitable for the detection and/or characterization of target particles in a fluid is disclosed. The device comprises: at least one heating element for heating and/or measuring a temperature, the heating element comprising a core comprising at least one electrically conducting portion, an electric isolating layer provided at a surface of the core and electrically isolates the core from the sample, and a plurality of binding sites at/to which target particles can bind. The device further comprising a processing means configured to measure an electric output of the least one heating element, a change of the electric output of the at least one heating element and/or its heating power and for deriving, based thereon, a characteristic of the target particles.

Abstract: A tooth with a retaining system for retaining the tooth in a receiving portion of an adapter in a cutting system comprises a first holding system to releasably retain the tooth to the adapter; and a second holding system to tension and secure the tooth with respect to the adapter.

Abstract: A tooth with a retaining system for retaining the tooth in a receiving portion of an adapter in a cutting system comprises a first holding system to releasably retain the tooth to the adapter; and a second holding system to tension and secure the tooth with respect to the adapter.

Abstract: A vessel (1) for forming a trench in a water bottom (100) includes a ladder (2) and trenching elements mounted to the ladder (2). The trenching elements are formed by a first upwardly inclined auger (10) for forming a first inclined trench wall (101) and a second upwardly inclined auger (20, 20?) for forming a second inclined trench wall (102). The first auger (10) is arranged to be rotated to move material of the water bottom (100) in an upward direction along the first auger (10).

Abstract: The invention relates to a device for harnessing energy from a body of water, which device comprises a Darrieus rotor having at least two Darrieus rotor blades, and comprises at least two connecting arms which connect the Darrieus rotor blades with a central axis, wherein per Darrieus rotor blade a first, proximal section of a connecting arm is connected to the central axis and a point of the connecting arm situated at a distance of the proximal section is connected to a first point on the Darrieus rotor blade, wherein at least the connection between the point of a connecting arm situated at a distance of the first proximal section and the first point on a Darrieus blade is a hingable connection, for every Darrieus rotor blade, of at least one connecting arm the connection between the proximal section of the connecting arm and the central axis is a rigid connection.

Abstract: A molten metal pump comprised of a metal base defining a pumping chamber is provided. The pump further includes a motor mount adapted to receive a motor, at least one metal post extending between the base and the motor mount, and a metal shaft disposed between the motor and an impeller disposed in the pumping chamber. A bearing ring engages the impeller. The pumping chamber will include an inlet and an outlet. A steel riser tube in fluid communication the outlet is also provided.

Abstract: The invention relates to a device for the utilization of wave energy, with an increased efficiency. Thereto, the device according to the invention comprises a Darrieus rotor having at least two Darrieus rotor blades, wherein the Darrieus rotor has a solidity ?D, and a Wells rotor having at least two Wells rotor blades, wherein the Wells rotor has a solidity ?W, wherein the Darrieus rotor and the Wells rotor are rotatable about a common axis of rotation A, and ?W is larger than or equal to ?D. The invention also relates to a method for harnessing wave energy.

Abstract: A system for detecting at least one contamination species in an interior space of a lithographic apparatus, including: at least one monitoring surface configured to be in contact with the interior space, a thermal controller configured to control the temperature of the monitoring surface to at least one detection temperature, and at least one detector configured to detect condensation of the at least one contamination species onto the monitoring surface.

Abstract: A system for detecting at least one contamination species in an interior space of a lithographic apparatus, including: at least one monitoring surface configured to be in contact with the interior space, a thermal controller configured to control the temperature of the monitoring surface to at least one detection temperature, and at least one detector configured to detect condensation of the at least one contamination species onto the monitoring surface.

Abstract: A system for detecting at least one contamination species in an interior space of a lithographic apparatus, including: at least one monitoring surface configured to be in contact with the interior space, a thermal controller configured to control the temperature of the monitoring surface to at least one detection temperature, and at least one detector configured to detect condensation of the at least one contamination species onto the monitoring surface.

Abstract: The invention relates to a device for harnessing energy from a body of water, which device comprises a Darrieus rotor having at least two Darrieus rotor blades, and comprises at least two connecting arms which connect the Darrieus rotor blades with a central axis, wherein per Darrieus rotor blade a first, proximal section of a connecting arm is connected to the central axis and a point of the connecting arm situated at a distance of the proximal section is connected to a first point on the Darrieus rotor blade, wherein at least the connection between the point of a connecting arm situated at a distance of the first proximal section and the first point on a Darrieus blade is a hingable connection, for every Darrieus rotor blade, of at least one connecting arm the connection between the proximal section of the connecting arm and the central axis is a rigid connection.

Abstract: The invention relates to a device for the utilisation of wave energy, with an increased efficiency. Thereto, the device according to the invention comprises a Darrieus rotor having at least two Darrieus rotor blades, wherein the Darrieus rotor has a solidity ?D, and a Wells rotor having at least two Wells rotor blades, wherein the Wells rotor has a solidity ?W, wherein the Darrieus rotor and the Wells rotor are rotatable about a common axis of rotation A, and ?W is larger than or equal to ?D. The invention also relates to a method for harnessing wave energy.

Abstract: A system for detecting at least one contamination species in an interior space of a lithographic apparatus, including: at least one monitoring surface configured to be in contact with the interior space, a thermal controller configured to control the temperature of the monitoring surface to at least one detection temperature, and at least one detector configured to detect condensation of the at least one contamination species onto the monitoring surface.