Patents by Inventor Peter D. Hob

Peter D. Hob has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for passivating a compound semiconductor surface and device having improved semiconductor-insulator interface
    Patent number: 4859253
    Abstract: A method for passivating the surface of a compound semiconductor comprises annealing the substrate to form an anion rich surface layer containing cationic and anionic oxides and stripping the oxides to leave only a very thin anionic layer on the surface. The substrate is then subjected to an H.sub.2 plasma cleaning to remove chemisorbed oxygen. An N.sub.2 plasma cleaning is then performed to form an anionic nitride layer that is free of any cationic nitride. A layer of insulating material, such as, a native or other oxide, or a nitride, is deposited. The resulting structure has a very low interface state density such that the Fermi level may be swept through the entire band gap.
    Type: Grant
    Filed: July 20, 1988
    Date of Patent: August 22, 1989
    Assignee: International Business Machines Corporation
    Inventors: Douglas A. Buchanan, Alessandro C. Callegari, Peter D. Hob, Dianne L. Lacey