Patents by Inventor Peter D. Nellist

Peter D. Nellist has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Aberration-corrected charged-particle optical apparatus
    Patent number: 6770887
    Abstract: Aberration-corrected charged-particle optical apparatus improving the resolution of charged-particle optical systems by eliminating or minimizing optical aberrations. The apparatus comprises a source of charged particles and a plurality of charged-particle lenses including non-round lenses, energized in such manner so as to correct axial aberrations of orders up to and including fifth order. The non-round lenses comprise quadrupoles and octupoles disposed in such manner that fifth order combination aberrations are precisely controlled in addition to third order aberrations. The resultant apparatus very significantly improves on resolution attainable with non-aberration corrected charged-particle round lenses. It also improves on resolution attainable with correctors of third order aberrations only.
    Type: Grant
    Filed: July 8, 2002
    Date of Patent: August 3, 2004
    Inventors: Ondrej L. Krivanek, Peter D. Nellist, Niklas Dellby
  • Aberration-corrected charged-particle optical apparatus
    Publication number: 20040004192
    Abstract: Aberration-corrected charged-particle optical apparatus improving the resolution of charged-particle optical systems by eliminating or minimizing optical aberrations. The apparatus comprises a source of charged particles and a plurality of charged-particle lenses including non-round lenses, energized in such manner so as to correct axial aberrations of orders up to and including fifth order. The non-round lenses comprise quadrupoles and octupoles disposed in such manner that fifth order combination aberrations are precisely controlled in addition to third order aberrations. The resultant apparatus very significantly improves on resolution attainable with non-aberration corrected charged-particle round lenses. It also improves on resolution attainable with correctors of third order aberrations only.
    Type: Application
    Filed: July 8, 2002
    Publication date: January 8, 2004
    Inventors: Ondrej L. Krivanek, Peter D. Nellist, Niklas Dellby