Abstract: A processing system is provided including a first chamber and a second chamber. The first chamber includes: a chamber body enclosing an interior volume; an edge ring having a top and a bottom, the edge ring including a first ledge extending inwardly from the top and a second ledge extending inwardly relative to the first ledge. The first ledge is configured to support a substrate and the second ledge is configured to support a susceptor. The first chamber further includes a plurality of heating lamps positioned over the edge ring. The second chamber includes: a chamber body enclosing an interior volume; a first cooling plate; one or more robots in the interior volume of the second chamber, the one or more robots having one or more end effectors positioned over the first cooling plate; and a plurality of lift pins extending through the first cooling plate.

Abstract: A transportable personal elevation device is attachable to a substrate which is a vehicle or trailer bed. The elevation device includes a platform assembly including a platform and a platform support member. The elevation device also includes a connector assembly including a pivot pin and a mounting structure. The connector assembly is configured and arranged such that when attached to the substrate, the elevation device can be pivotally moved about the pivot pin between a storage position and an outwardly extending position. The elevation device may also include a latch assembly for temporarily fixing a position of the device, and may further include a post which is attached to a side of the platform assembly to permit grasping thereof by a user. The elevation device may take the form of a pivotable stair assembly, or alternatively, may include a power-assisted platform which can be selectively raised and lowered.

Abstract: A transportable personal elevation device is attachable to a substrate which is a vehicle or trailer bed. The elevation device includes a platform assembly including a platform and a platform support member. The elevation device also includes a connector assembly including a pivot pin and a mounting structure. The connector assembly is configured and arranged such that when attached to the substrate, the elevation device can be pivotally moved about the pivot pin between a storage position and an outwardly extending position. The elevation device may also include a latch assembly for temporarily fixing a position of the device, and may further include a post which is attached to a side of the platform assembly to permit grasping thereof by a user. The elevation device may take the form of a pivotable stair assembly which can be folded into a storage configuration and stored beneath a truck trailer.

Abstract: Embodiments of the present disclosure include a radial frequency plasma source having a split type inner coil assembly. In one embodiment, the split type inner coil assembly comprises two intertwining coils. In another embodiment, the split type inner coil assembly includes looped coils forming a dome.

Abstract: A processing chamber for processing a substrate is disclosed herein. In one embodiment, the processing chamber includes a support shaft assembly. The support shaft assembly has a ring shaped susceptor, a disc shaped heat plate, and a support shaft system. The support shaft system supports the susceptor and the heat plate, such that the susceptor is supported above the heat plate defining a gap between the heat plate and the susceptor. In another embodiment, the heat plate includes a plurality of grooves and the susceptor includes a plurality of fins. The fins are configured to sit within the grooves such that the susceptor is supported above the heat plate, defining a gap between the heat plate and the susceptor. In another embodiment, a method of processing a substrate in the aforementioned embodiments is disclosed herein.