Abstract: An interferometric measuring device for measuring a surface or profile of an object includes a beam generating unit operable to generate a measurement beam with a spectral component at a wavelength smaller than 550 nm, a splitter to branch off an object beam and a reference beam from the measurement beam, a measurement probe connected to the beam generating unit and configured to direct the object beam onto the surface and to capture a portion of the object beam reflected from the surface as a signal beam, a signal analyzer connected to a detector unit and operable to derive a distance between the measurement probe and the surface on the basis of signals obtained from first and second detectors operable to detect first and second partial beams from an analysis beam being a recombination of the signal beam and the reference beam.

Abstract: A distance measuring arrangement for determining a distance from an object includes at least one light source for producing at least one first monochromatic and interference-capable light beam with a first wavelength and at least one second monochromatic and interference-capable light beam with a second wavelength, a multiplexer for coupling or combining the at least one first light beam and the at least one second light beam into a common measurement beam, an output coupling element for splitting the measurement beam into a reference beam and a signal beam, wherein the reference beam propagates along a reference path and wherein the signal beam propagates along a signal path, and a phase modulator that is arranged in the signal path and configured to modulate the phase of the signal beam periodically in time.

Abstract: A distance measuring arrangement for determining a distance from an object includes at least one light source for producing at least one first monochromatic and interference-capable light beam with a first wavelength and at least one second monochromatic and interference-capable light beam with a second wavelength, a multiplexer for coupling or combining the at least one first light beam and the at least one second light beam into a common measurement beam, an output coupling element for splitting the measurement beam into a reference beam and a signal beam, wherein the reference beam propagates along a reference path and wherein the signal beam propagates along a signal path, and a phase modulator that is arranged in the signal path and configured to modulate the phase of the signal beam periodically in time.