Abstract: The invention relates to diagnostic methods according to the preamble of the equivalent claims 1 and 2, with which the state of a poppet valve in the course of the switching cycles and/or events thereof, such as the occurrence of pressure shocks or surges during continuous operation is/are monitored continuously, the measured signals are stored and the stored measured signals are interpreted in a targeted manner and early indication of cases of damage is carried out.

Abstract: The invention relates to diagnostic methods according to the preamble of the equivalent claims 1 and 2, with which the state of a poppet valve in the course of the switching cycles and/or events thereof, such as the occurrence of pressure shocks or surges during continuous operation is/are monitored continuously, the measured signals are stored and the stored measured signals are interpreted in a targeted manner and early indication of cases of damage is carried out.

Abstract: A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side having a blade angle (?) that is steeper than blade angle (?) of the blades (10) located in vicinity of the vacuum side, and with the blade angle (?) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.

Abstract: A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet of the high-vacuum pump.

Abstract: A machine, having a high-speed rotor, and stationary components having connection surfaces for connecting the machine with external components and/or the stationary components with each other and provided with outer surface layers having a high friction coefficient.

Abstract: A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side (2) having a blade angle (?) that is steeper than blade angle (?) of the blades (10) located in vicinity of the vacuum side (3), and with the blade angle (?) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.

Abstract: A connection element for connecting two parts, in particular, an external component with a vacuum pump, includes a first member engageable with the external component, and a second member engageable with the connection component provided on the pump housing, with the first and second members being slidable relative to each other during connection of the external component with the vacuum pump and having slidable relative to each other surfaces having a predetermined and unchangeable frictional resistance.

Abstract: A vacuum pump system for delivering light gases and including at least one high-vacuum pump and at least one intermediate pump connected directly with the outlet of the high-vacuum pump and with small conductance losses.

Abstract: A vacuum pump including a housing having a suction opening in its high-vacuum region, a gas outlet opening in its high pressure region, pump-active cooperating rotor and stator components arranged in the housing for pumping gases from the suction opening to the outlet opening, with an end of the pump-active components adjoining the high pressure region being connected with the gas outlet opening via intermediate chamber, a heating device provided in the intermediate chamber and connected with stator components, which are located in the high pressure region, by a connection having a high thermal conductibility, and thermal resistance elements for separating the heating device from the housing.

Abstract: A machine, having a high-speed rotor, and stationary components having connection surfaces for connecting the machine with external components and/or the stationary components with each other and provided with outer surface layers having a high friction coefficient.

Abstract: A gas friction pump including a plurality of pumping active rotor and stator components arranged in the pump housing for delivery of gases and for producing a compression ration and having a diameter larger than a diameter of the suction opening formed in the housing, and a modified rotor component located adjacent to the suction opening and having a radial extent which increases starting from the suction opening in a direction of a radial extent of the pumping active rotor and stator components.

Abstract: A turbomolecular pump including a plurality of rotor and stator discs alternatingly arranged with each other, a plurality of spacer rings for spacing the stator discs from each other, and at least one elastically deformable metallic member arranged between at least two spacer rings, with the stator discs, the spacer rings, and the elastically deformable metallic member forming together a stator stack.

Abstract: A vacuum pump including a housing having a suction opening in its high-vacuum region, a gas outlet opening in its high pressure region, pump-active cooperating rotor and stator components arranged in the housing for pumping gases from the suction opening to the outlet opening, with an end of the pump-active components adjoining the high pressure region being connected with the gas outlet opening via intermediate chamber, a heating device provided in the intermediate chamber and connected with stator components, which are located in the high pressure region, by a connection having a high thermal conductibility, and thermal resistance elements for separating the heating device from the housing.

Abstract: A gas friction pump including a plurality of pumping active rotor and stator components arranged in the pump housing for delivery of gases and for producing a compression ration and having a diameter larger than a diameter of the suction opening formed in the housing, and a modified rotor component located adjacent to the suction opening and having a radial extent which increases starting from the suction opening in a direction of a radial extent of the pumping active rotor and stator components.

Abstract: A turbomolecular pump including a plurality of rotor and stator discs alternatingly arranged with each other, a plurality of spacer rings for spacing the stator discs from each other, and at least one elastically deformable metallic member arranged between at least two spacer rings, with the stator discs, the spacer rings, and the elastically deformable metallic member forming together a stator stack.