Patents by Inventor Peter Folmer Nielsen
Peter Folmer Nielsen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11693028Abstract: A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.Type: GrantFiled: November 15, 2018Date of Patent: July 4, 2023Assignee: KLA CORPORATIONInventors: Frederik Westergaard Østerberg, Dirch Hjorth Petersen, Henrik Hartmann Henrichsen, Alberto Cagliani, Ole Hansen, Peter Folmer Nielsen
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Publication number: 20200278380Abstract: A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.Type: ApplicationFiled: November 15, 2018Publication date: September 3, 2020Inventors: Frederik Westergaard Østerberg, Dirch Hjorth Petersen, Henrik Hartmann Henrichsen, Alberto Cagliani, Ole Hansen, Peter Folmer Nielsen
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Patent number: 8378697Abstract: A method for aligning a probe relative to a supporting substrate defining a first planar surface, an edge, and a first crystal plane includes the steps of masking the surface of the substrate to define an exposed area on the first surface at the edge; and etching, using an etch reagent, a recess in the exposed area, the recess defining first and second opposed sidewalls, an end wall remote from the edge, and a bottom wall. The method further includes the step of providing a probe substrate defining a second planar surface and a second crystal plane identical to the first crystal plane, and positioning the probe substrate so that the first and the second crystal planes are positioned identically when forming a probe from the probe substrate using the etch reagent, wherein the probe defines congruent surfaces to the first and second sidewalls.Type: GrantFiled: March 25, 2011Date of Patent: February 19, 2013Assignee: Capres A/SInventors: Peter Folmer Nielsen, Peter R. E. Petersen, Jesper Erdman Hansen
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Publication number: 20110169515Abstract: A method for aligning a probe relative to a supporting substrate defining a first planar surface, an edge, and a first crystal plane includes the steps of masking the surface of the substrate to define an exposed area on the first surface at the edge; and etching, using an etch reagent, a recess in the exposed area, the recess defining first and second opposed sidewalls, an end wall remote from the edge, and a bottom wall. The method further includes the step of providing a probe substrate defining a second planar surface and a second crystal plane identical to the first crystal plane, and positioning the probe substrate so that the first and the second crystal planes are positioned identically when forming a probe from the probe substrate using the etch reagent, wherein the probe defines congruent surfaces to the first and second sidewalls.Type: ApplicationFiled: March 25, 2011Publication date: July 14, 2011Inventors: Peter Folmer NIELSEN, Peter R.E. PETERSEN, Jesper Erdman HANSEN
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Patent number: 7936176Abstract: A method for aligning a probe relative to a supporting substrate defining a first planar surface, an edge, and a first crystal plane includes the steps of masking the surface of the substrate to define an exposed area on the first surface at the edge; and etching, using an etch reagent, a recess in the exposed area, the recess defining first and second opposed sidewalls, an end wall remote from the edge, and a bottom wall. The method further includes the step of providing a probe substrate defining a second planar surface and a second crystal plane identical to the first crystal plane, and positioning the probe substrate so that the first and the second crystal planes are positioned identically when forming a probe from the probe substrate using the etch reagent, wherein the probe defines congruent surfaces to the first and second sidewalls.Type: GrantFiled: June 21, 2005Date of Patent: May 3, 2011Assignee: Capres A/SInventors: Peter Folmer Nielsen, Peter R. E. Petersen, Jesper Erdman Hansen
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Publication number: 20090009200Abstract: A method for aligning a probe relative to a Supporting substrate defining a first planar surface, an edge, and a first crystal plane includes the steps of masking the surface of the substrate to define an exposed area on the first surface at the edge; and etching, using an etch reagent, a recess in the exposed area, the recess defining first and second opposed sidewalls, an end wall remote from the edge, and a bottom wall. The method further includes the step of providing a probe substrate defining a second planar surface and a second crystal plane identical to the first crystal plane, and positioning the probe substrate so that the first and the second crystal planes are positioned identically when forming a probe from the probe substrate using the etch reagent, wherein the probe defines congruent surfaces to the first and second sidewalls.Type: ApplicationFiled: June 21, 2005Publication date: January 8, 2009Applicant: Capres A/SInventors: Peter Folmer Nielsen, Peter R.E. Petersen, Jesper Erdman Hansen
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Patent number: 7307436Abstract: An electrical feedback detection system for detecting electrical contact between a multi-point probe and an electrically conducting material test sample surface. The electrical feedback detection system comprises an electrical detector unit connected to a multitude of electrodes in the multi-point probe, and optionally directly to the test sample surface. The detector unit provides an electrical signal to a multi-point testing apparatus, which can be used to determine if the multi-point probe is in electrical contact with the test sample surface. The detector unit comprises an electrical generator means for generating an electrical signal that is driven through a first multitude of electrodes of the multi-point probe, and a second multitude of switched impedance detection elements. The electrical potential across the impedance detection elements determines the electrical contact to the test sample surface.Type: GrantFiled: August 24, 2006Date of Patent: December 11, 2007Assignee: Capres A/SInventors: Christian Leth Petersen, Peter Folmer Nielsen
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Patent number: 7304486Abstract: The multi-point probe comprises a supporting body defining a first surface, a first multitude of conductive probe arms each of the probe arms defining a proximal end and a distal end being positioned in co-planar relationship with the first surface of the supporting body. The probe arms are connected to the supporting body at the proximal ends thereof and have the distal ends freely extending from the supporting body, giving individually flexible motion to the first multitude of probe arms. The probe arms originate from a process of producing the probe arms on a wafer body in facial contact with the wafer body and removal of a part of the wafer body providing the supporting body and providing the probe arms freely extending therefrom. The multi-point probe further comprises a third multitude of tip elements extending from the distal end of the first multitude of probe arms. The tip elements originate from a process of metallization of electron beam depositions on the probe arms at the distal ends thereof.Type: GrantFiled: March 14, 2002Date of Patent: December 4, 2007Assignee: Capres A/SInventors: Christian Leth Petersen, Ulrich Quaade, Peter Folmer Nielsen, Francois Grey, Peter Bøggild
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Patent number: 7135876Abstract: An electrical feedback detection system for detecting electrical contact between a multi-point probe and an electrically conducting material test sample surface. The electrical feedback detection system comprises an electrical detector unit connected to a multitude of electrodes in the multi-point probe, and optionally directly to the test sample surface. The detector unit provides an electrical signal to a multi-point testing apparatus, which can be used to determine if the multi-point probe is in electrical contact with the test sample surface. The detector unit comprises an electrical generator means for generating an electrical signal that is driven through a first multitude of electrodes of the multi-point probe, and a second multitude of switched impedance detection elements. The electrical potential across the impedance detection elements determines the electrical contact to the test sample surface.Type: GrantFiled: January 7, 2003Date of Patent: November 14, 2006Assignee: Capres A/SInventors: Christian Leth Petersen, Peter Folmer Nielsen
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Publication number: 20020153909Abstract: A multi-point probe, a method for producing the multi-point probe and a cylindrical nano-drive for in particular driving the multi-point probe in a multi-point testing apparatus for testing electric properties on a specific location of a test sample. The multi-point probe comprises a supporting body defining a first surface, a first multitude of conductive probe arms each of the conductive probe arms defining a proximal end and a distal end being positioned in co-planar relationship with the first surface of the supporting body. The conductive probe arms are connected to the supporting body at the proximal ends thereof and have the distal ends freely extending from the supporting body, giving individually flexible motion to the first multitude of conductive probe arms.Type: ApplicationFiled: March 14, 2002Publication date: October 24, 2002Inventors: Christian Leth Petersen, Ulrich Quaade, Peter Folmer Nielsen, Francois Grey, Peter Boggild
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Patent number: D717188Type: GrantFiled: May 28, 2013Date of Patent: November 11, 2014Assignee: Capres A/SInventors: Hans Henrik Jochumsen, Anders Jensen, Jannik Sadolin, Niels Torp Madsen, Lars Norregaard, Chaker Khalfaoui, Henrik Baekbo, Lauge Gammelgaard, Peter Folmer Nielsen, Hans Henrik Jankjaer
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Patent number: D717189Type: GrantFiled: May 28, 2013Date of Patent: November 11, 2014Assignee: Capres A/SInventors: Hans Henrik Jochumsen, Anders Jensen, Jannik Sadolin, Niels Torp Madsen, Lars Norregaard, Chaker Khalfaoui, Henrik Baekbo, Lauge Gammelgaard, Peter Folmer Nielsen, Hans Henrik Jankjaer
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Rack, cover, connector, and handle assembly for a rack-supported multi-point electrical probe holder
Patent number: D717190Type: GrantFiled: May 28, 2013Date of Patent: November 11, 2014Assignee: Capres A/SInventors: Hans Henrik Jochumsen, Anders Jensen, Jannik Sadolin, Niels Torp Madsen, Lars Norregaard, Chaker Khalfaoui, Henrik Baekbo, Lauge Gammelgaard, Peter Folmer Nielsen, Hans Henrik Jankjaer