Patents by Inventor Peter G. Steeneken
Peter G. Steeneken has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9576738Abstract: A capacitive MEMS structure comprising first and second opposing capacitor electrode arrangements, wherein at least one of the electrode arrangements is movable, and a dielectric material located adjacent to the second electrode arrangement, wherein the second electrode arrangement is patterned such that it includes electrode areas and spaces adjacent to the electrode areas, and wherein the dielectric material extends at least partially in or over the spaces.Type: GrantFiled: November 17, 2014Date of Patent: February 21, 2017Assignee: NXP B.V.Inventors: Peter G. Steeneken, Klaus Reimann
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Publication number: 20150092315Abstract: A capacitive MEMS structure comprising first and second opposing capacitor electrode arrangements, wherein at least one of the electrode arrangements is movable, and a dielectric material located adjacent to the second electrode arrangement, wherein the second electrode arrangement is patterned such that it includes electrode areas and spaces adjacent to the electrode areas, and wherein the dielectric material extends at least partially in or over the spaces.Type: ApplicationFiled: November 17, 2014Publication date: April 2, 2015Applicant: NXP B.V.Inventors: PETER G. STEENEKEN, KLAUS REIMANN
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Patent number: 8890543Abstract: A MEMS tunable capacitor comprises first and second opposing capacitor electrodes, wherein the second capacitor electrode is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material and a non-tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode faces the movable second electrode for electrically controlling tunable dielectric material. A controller is adapted to vary the capacitor dielectric spacing for a first continuous range of adjustment of the capacitance of the MEMS capacitor, and to tune the dielectric material for a second continuous range of adjustment of the capacitance of the MEMS capacitor, thereby to provide a continuous analogue range of adjustment including the first and second ranges.Type: GrantFiled: June 9, 2008Date of Patent: November 18, 2014Assignee: NXP B.V.Inventors: Peter G. Steeneken, Klaus Reimann
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Patent number: 8680951Abstract: A micro-electromechanical resonator comprising a material having anisotropic directional elasticity characteristics. A shape of the resonator is such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge. This is true for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction.Type: GrantFiled: May 8, 2009Date of Patent: March 25, 2014Assignee: NXP, B.V.Inventor: Peter G. Steeneken
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Patent number: 8339764Abstract: A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber (50) is provided between the electrodes, at a first pressure, and a second gas chamber (52) is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.Type: GrantFiled: May 7, 2009Date of Patent: December 25, 2012Assignee: NXP B.V.Inventors: Peter G. Steeneken, Hilco Suy, Martijn Goossens
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Patent number: 8203402Abstract: The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate. The MEMS element includes a first electrode and a second electrode, that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode is separated from the first electrode by an air gap in its first position. The movable element includes a mechanical layer and an intermediate layer, in which the second electrode is defined. The second electrode is constituted by a plurality of sections in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect to the mechanical layer.Type: GrantFiled: October 24, 2005Date of Patent: June 19, 2012Assignee: Epcos AGInventors: Peter G. Steeneken, Jozef Thomas Martinus Van Beek, Theodoor Rijks
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Patent number: 8194386Abstract: A tuneable capacitor arrangement for RF use has two series coupled MEMS variable capacitors (C1,C2;C4,C5,C6,C7), varied according to a control signal. The series coupling enables the capacitor to withstand a higher voltage since this is shared by the individual capacitors in a series coupled arrangement. An increase in size of electrodes for each capacitor is compensated by a reduction in size of the springs supporting movable electrodes. These springs can have a larger stiffness value since the capacitance is larger. This means shorter springs, which can also result in a reduction in problems of stiction, resistance, and slow switching. The capacitances have a fixed and a movable electrode, with the RF signal coupled to the fixed electrode to avoid the springs needing to carry an RF signal. This can reduce the problems of inductance and resistance in the springs.Type: GrantFiled: December 18, 2006Date of Patent: June 5, 2012Assignee: EPCOS AGInventors: Peter G. Steeneken, Kevin R. Boyle, Antonius J. M. De Graauw, Theodoor G. S. M. Rijks, Jozef T. M. Van Beek
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Patent number: 8149076Abstract: The present invention relates to MEMS device that comprises a first electrode, and a second electrode suspended with a distance to the first electrode with the aid of a suspension structure. The MEMS device further comprises at least one deformation electrode. The second electrode or the suspension structure or both are plastically deformable upon application of an electrostatic deformation force via the deformation electrode. This way, variations in the off-state position of the second electrode that occur during fabrication of different devices or during operation of a single device can be eliminated.Type: GrantFiled: December 10, 2007Date of Patent: April 3, 2012Assignee: NXP B.V.Inventor: Peter G. Steeneken
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Patent number: 8098120Abstract: A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.Type: GrantFiled: October 24, 2005Date of Patent: January 17, 2012Assignee: EPCOS AGInventors: Peter G. Steeneken, Jozef Thomas Martinus Van Beek, Theo Rijks
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Patent number: 7969262Abstract: A micro-electromechanical device has a substrate (10), a movable element, movable towards the substrate by electrostatic forces on electrodes, facing surfaces of the movable element and the substrate being shaped such that one or more venting channels (VC) are defined by the facing surfaces when they are in a closed position, configured to enable fluid between the facing surfaces to flow across the facing surfaces, to enter or exit the area between the facing surfaces. Such channels can enable fluid damping of the movement of the moveable element to be controlled. Increasing the flow entering or exiting the area between the facing surfaces, can reduce such damping, and hence increase speed of opening and closing of the device. The channels can connect to holes in the electrodes.Type: GrantFiled: October 24, 2005Date of Patent: June 28, 2011Assignee: Epcos AGInventors: Peter G. Steeneken, Jozef Thomas Martinus Van Beek, Theodoor Rijks
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Publication number: 20110063052Abstract: A micro-electromechanical resonator comprising a material having anisotropic directional elasticity characteristics. A shape of the resonator is such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge. This is true for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction.Type: ApplicationFiled: May 8, 2009Publication date: March 17, 2011Applicant: NXP B.V.Inventor: Peter G. Steeneken
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Publication number: 20110051312Abstract: A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber (50) is provided between the electrodes, at a first pressure, and a second gas chamber (52) is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.Type: ApplicationFiled: May 7, 2009Publication date: March 3, 2011Inventors: Peter G. Steeneken, Hilco Suy, Martijn Goossens
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Publication number: 20100182731Abstract: A MEMS tunable capacitor comprises first and second opposing capacitor electrodes (10,12), wherein the second capacitor electrode (12) is movable by a MEMS switch to vary the capacitor dielectric spacing, and thereby tune the capacitance. A tunable dielectric material (14) and a non-tunable dielectric material are in series between the first and second electrodes. The tunable dielectric material occupies a dimension gd of the electrode spacing, and the non-tunable dielectric material occupies a dimension g of the electrode spacing. A third electrode (20) faces the movable second electrode (12) for electrically controlling tunable dielectric material.Type: ApplicationFiled: June 6, 2008Publication date: July 22, 2010Applicant: NXP B.V.Inventors: Peter G. Steeneken, Klaus Reimann
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Publication number: 20100025206Abstract: The present invention relates to MEMS device that comprises a first electrode, and a second electrode suspended with a distance to the first electrode with the aid of a suspension structure. The MEMS device further comprises at least one deformation electrode. The second electrode or the suspension structure or both are plastically deformable upon application of an electrostatic deformation force via the deformation electrode. This way, variations in the off-state position of the second electrode that occur during fabrication of different devices or during operation of a single device can be eliminated.Type: ApplicationFiled: December 10, 2007Publication date: February 4, 2010Applicant: NXP, B.V.Inventor: Peter G. Steeneken
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Publication number: 20100001615Abstract: A micro-electromechanical device has a substrate (10), a movable element, movable towards the substrate by electrostatic forces on electrodes, facing surfaces of the movable element and the substrate being shaped such that one or more venting channels (VC) are defined by the facing surfaces when they are in a closed position, configured to enable fluid between the facing surfaces to flow across the facing surfaces, to enter or exit the area between the facing surfaces. Such channels can enable fluid damping of the movement of the moveable element to be controlled. Increasing the flow entering or exiting the area between the facing surfaces, can reduce such damping, and hence increase speed of opening and closing of the device. The channels can connect to holes in the electrodes.Type: ApplicationFiled: October 24, 2005Publication date: January 7, 2010Applicant: EPCOS AGInventors: Peter G. Steeneken, Jozef Thomas Martinus Van Beek, Theo Rijks
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Publication number: 20090237858Abstract: A tuneable capacitor arrangement for RF use has two series coupled MEMS variable capacitors (C1,C2;C4,C5,C6,C7), varied according to a control signal. The series coupling enables the capacitor to withstand a higher voltage since this is shared by the individual capacitors in a series coupled arrangement. An increase in size of electrodes for each capacitor is compensated by a reduction in size of the springs supporting movable electrodes. These springs can have a larger stiffness value since the capacitance is larger. This means shorter springs, which can also result in a reduction in problems of stiction, resistance, and slow switching. The capacitances have a fixed and a movable electrode, with the RF signal coupled to the fixed electrode to avoid the springs needing to carry an RF signal. This can reduce the problems of inductance and resistance in the springs.Type: ApplicationFiled: December 18, 2006Publication date: September 24, 2009Inventors: Peter G. Steeneken, Kevin R. Boyle, Antonius J.M. De Graauw, Theodoor G.S.M. Rijks, Jozef T.M. Van Beek
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Publication number: 20090211885Abstract: The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate (14). The MEMS element comprises a first electrode (101) and a second electrode (11), that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode (11) is separated from the first electrode (101) by an air gap (110) in its first position. The movable element comprises a mechanical layer (12) and an intermediate layer, in which the second electrode (11) is defined. The second electrode (11) is constituted by a plurality of sections (131, 132, 133) in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect (121, 122, 123) to the mechanical layer (12).Type: ApplicationFiled: October 24, 2005Publication date: August 27, 2009Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Peter G. Steeneken, Jozef Thomas Martinus Van Beek, Theodoor Rijks
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Publication number: 20080135385Abstract: A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.Type: ApplicationFiled: October 24, 2005Publication date: June 12, 2008Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Peter G. Steeneken, Jozef Thomas Martinus Van Beek, Theo Rijks