Patents by Inventor Peter Gerhardus Wihelmus Bussink

Peter Gerhardus Wihelmus Bussink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and contamination detection method
    Patent number: 8547551
    Abstract: A lithographic apparatus includes a vessel that encloses a component with a test surface to be probed for contamination control; and an optical probe configured to transmit and receive an optical probing beam. The vessel includes a first optical port configured to transfer the optical probing beam towards the test surface, and a second optical port configured to receive a reflected optical probing beam. The optical probe includes a light source configured to provide the optical probing beam, a polarization conditioner configured to provide a predefined polarization state to the probing beam, and a spectral analyzer. The polarization conditioner is preset to provide a minimal transmission for a minimal transmission wavelength, and the spectral analyzer is arranged to detect a wavelength shift of the minimal transmission wavelength in response to a polarization change due to the presence of contamination.
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: October 1, 2013
    Assignee: ASML Netherlands B.V.
    Inventors: Anastasius Jacobus Anicetus Bruinsma, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Abraham Veefkind, Peter Gerhardus Wihelmus Bussink, Egbert Anne Martijn Brouwer