Patents by Inventor Peter Grabitz

Peter Grabitz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11410858
    Abstract: An apparatus includes a housing having an elongated chamber, an inlet opening extending into the chamber, and a slit shaped outlet opening. A tube element extends in a longitudinal direction through the chamber and is at least partially transparent to UV radiation. The tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber. At least one UV-radiation source in the tube element is arranged to emit UV-radiation in the direction of the flow space and through the outlet opening out of the housing to generate radicals in the liquid and bring the radicals to the substrate surface. Means are provided for adjusting the radiation exiting the outlet opening through the tube element such that the intensity of the radiation increases towards the longitudinal center plane of the chamber.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: August 9, 2022
    Assignee: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Patent number: 11130158
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed, the apparatus comprising: a housing having an elongated chamber, at least one inlet opening, which opens into the chamber, and at least one slit shaped outlet opening opposite the inlet opening, which extends over the length of the chamber, a tube element, which extends in a longitudinal direction through the chamber, the tube element being at least partially transparent to UV radiation, wherein the tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber, the flow space being symmetric with respect to a longitudinal centre plane of the chamber, the longitudinal centre plane dissecting the outlet opening in its middle, and such that the tube element extends into the slit shaped outlet opening in the housing and thereby forms two longitudinally extending outlet slits between the tube element and the housing, and at least one UV-radiation sour
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: September 28, 2021
    Assignee: SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Patent number: 11090693
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed, the apparatus comprising: a housing having an elongated chamber, at least one inlet opening, which opens into the chamber, and at least one slit shaped outlet opening opposite the inlet opening, which extends over the length of the chamber, a tube element, which extends in a longitudinal direction through the chamber, the tube element being at least partially transparent to UV radiation, wherein the tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber, the flow space being symmetric with respect to a longitudinal centre plane of the chamber, the longitudinal centre plane dissecting the outlet opening in its middle, and such that the tube element extends into the slit shaped outlet opening in the housing and thereby forms two longitudinally extending outlet silts between the tube element and the housing, and at least one UV-radiation sour
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: August 17, 2021
    Assignee: SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Publication number: 20200075354
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed.
    Type: Application
    Filed: March 1, 2018
    Publication date: March 5, 2020
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Publication number: 20180243802
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed, the apparatus comprising: a housing having an elongated chamber, at least one inlet opening, which opens into the chamber, and at least one slit shaped outlet opening opposite the inlet opening, which extends over the length of the chamber, a tube element, which extends in a longitudinal direction through the chamber, the tube element being at least partially transparent to UV radiation, wherein the tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber, the flow space being symmetric with respect to a longitudinal centre plane of the chamber, the longitudinal centre plane dissecting the outlet opening in its middle, and such that the tube element extends into the slit shaped outlet opening in the housing and thereby forms two longitudinally extending outlet slits between the tube element and the housing, and at least one UV-radiation sour
    Type: Application
    Filed: August 24, 2016
    Publication date: August 30, 2018
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Publication number: 20180221919
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed, the apparatus comprising: a housing having an elongated chamber, at least one inlet opening, which opens into the chamber, and at least one slit shaped outlet opening opposite the inlet opening, which extends over the length of the chamber, a tube element, which extends in a longitudinal direction through the chamber, the tube element being at least partially transparent to UV radiation, wherein the tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber, the flow space being symmetric with respect to a longitudinal centre plane of the chamber, the longitudinal centre plane dissecting the outlet opening in its middle, and such that the tube element extends into the slit shaped outlet opening in the housing and thereby forms two longitudinally extending outlet silts between the tube element and the housing, and at least one UV-radiation sour
    Type: Application
    Filed: August 24, 2016
    Publication date: August 9, 2018
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Publication number: 20120080088
    Abstract: A method is disclosed for making contact with a semiconductor substrate, in particular for making contact with solar cells, in which a metallic seed structure is generated on the surface through a dielectric or passivating layer by means of an LIFT process, and the seed structure is then reinforced.
    Type: Application
    Filed: October 28, 2011
    Publication date: April 5, 2012
    Applicant: Universitaet Stuttgart
    Inventors: Peter Grabitz, Juergen Koehler, Tobias Roeder, Juergen H. Werner