Abstract: In relation to a vibration isolation system, which comprises at least one vibration isolation device that can be assigned to an isolation element, the fact that a method of recording the system with the aid of a closed-loop and/or open-loop control device is provided, in which a closed-loop and/or open-loop control structure can be predefined and in which signals and/or variables related to the isolation system are picked up, processed and/or provided, and in which, on the basis of the definable structures and variables, at least one isolation system characteristic data set for assessing the vibration isolation system is formed, means that for the first time the indicative fundamentals for an open system for evaluation, closed-loop and open-loop control are provided.

Abstract: By virtue of the fact that the invention provides an apparatus that comprises at least one first vibration-isolating device, arranged between a load and a standing surface, for at least partially decoupling the static and dynamic forces acting between the load and the standing surface, and includes at least one second vibration-isolating device assigned to the first one and/or the load, for absorbing the substantially decoupled dynamic forces, the possibility arises for the first time that the dynamic forces acting on the apparatus and/or originating from the apparatus can be decoupled substantially from the static forces in a fashion actively isolating vibrations.

Abstract: A device which scans in a raster mode, in particular to a raster microscope, provides a rapid and inexpensive compensation of the disturbing effects of mechanical vibrations on the scanning process. The device includes a sensor for sensing mechanical vibrations and driving a filter whose output, together with the output of the device for the production of a z-signal, is connected to an adder, the output of which drives the device for changing the distance between the specimen and the sensor.

Abstract: A supporting device (53) provided with a first part (69), a second part (71), and a gas spring (73) for supporting the second part relative to the first part parallel to a support direction (Z). The gas spring (73) comprises a pressure chamber (75) which is provided in an intermediate part (79) and is bounded by a piston (81) which is displaceable in the intermediate part (79) parallel to the support direction and is supported perpendicularly to the support direction by means of a static gas bearing (85). A stiffness of the supporting device parallel to the support direction is thus substantially entirely determined by a stiffness of the gas spring, and a low stiffness can be achieved through a suitable design of the gas spring. A transmission of vibrations directed parallel to the support direction from the first part to the second part is prevented as much as possible thereby. The invention also relates to a lithography device having a plurality of such supporting devices.

Abstract: Apparatus for preventing changes of the position of a machine, such as a measuring machine, has several pneumatic bearings which floatingly support the machine and receive signals from a digital computer to ensure timely selection of resistance which must be offered by the bearings to changes of the position of the machine relative to its support while a mobile part of the machine moves relative to the part which is supported by the bearings. Signals which are stored in the memory of the computer are calculated in advance or are obtained as a result of one or more test runs by taking into consideration all parameters which are likely to impart to the bearing-supported part or parts a tendency to change its or their positions. Such parameters include the distance to be covered by the mobile part, the configuration of the path of movement of the mobile part, the velocity of the mobile part, the mass of the mobile part and of the bearing-supported part or parts, the inertia of the bearings and others.