Patents by Inventor Peter HELMUS

Peter HELMUS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240369947
    Abstract: A method for reducing sticking of an object to a surface used in a lithography process includes receiving, at a control computer, instructions for a tool configured to modify the surface and forming, in a deterministic manner based on the instructions received at the control computer, a modified surface having a furrow and a ridge, wherein the ridge reduces the sticking by reducing a contact surface area of the modified surface. Another apparatus includes a modified surface that includes furrows and ridges forming a reduced contact surface area to reduce a sticking of an object to the modified surface, the ridges having an elastic property that causes the reduced contact surface area to increase when the plurality of ridges is elastically deformed.
    Type: Application
    Filed: July 15, 2024
    Publication date: November 7, 2024
    Applicant: ASML Holding N.V.
    Inventors: Mehmet Ali AKBAS, Tammo UITTERDIJK, Christopher John MASON, Matthew LIPSON, David Hart PETERSON, Michael PERRY, Peter HELMUS, Jerry Jianguo DENG, Damoon SOHRABIBABAHEIDARY
  • Patent number: 12111581
    Abstract: A method for reducing sticking of an object to a surface used in a lithography process includes receiving, at a control computer, instructions for a tool configured to modify the surface and forming, in a deterministic manner based on the instructions received at the control computer, a modified surface having a furrow and a ridge, wherein the ridge reduces the sticking by reducing a contact surface area of the modified surface. Another apparatus includes a modified surface that includes furrows and ridges forming a reduced contact surface area to reduce a sticking of an object to the modified surface, the ridges having an elastic property that causes the reduced contact surface area to increase when the plurality of ridges is elastically deformed.
    Type: Grant
    Filed: October 22, 2019
    Date of Patent: October 8, 2024
    Assignee: ASML Holding N.V.
    Inventors: Mehmet Ali Akbas, Tammo Uitterdijk, Christopher John Mason, Matthew Lipson, David Hart Peterson, Michael Perry, Peter Helmus, Jerry Jianguo Deng, Damoon Sohrabibabaheidary
  • Publication number: 20220134480
    Abstract: Methods, computer program products, and apparatuses for reducing sticking during a lithography process are disclosed. An exemplary method of reducing sticking of an object to a modified surface that is used to support the object in a lithography process can include controlling a light source to deliver light to a native surface thereby causing ablation of at least a portion of the native surface to increase the roughness of the native surface thereby forming the modified surface. The increased roughness reduces the ability of the object to stick to the modified surface.
    Type: Application
    Filed: February 3, 2020
    Publication date: May 5, 2022
    Applicant: ASML Holding N.V.
    Inventors: Damoon SOHRABIBABAHEIDARY, Christopher John MASON, Peter HELMUS, Mehmet Ali AKBAS, Bensely ALBERT, Benjamin David DAWSON
  • Publication number: 20210405539
    Abstract: A method for reducing sticking of an object to a surface used in a lithography process includes receiving, at a control computer, instructions for a tool configured to modify the surface and forming, in a deterministic manner based on the instructions received at the control computer, a modified surface having a furrow and a ridge, wherein the ridge reduces the sticking by reducing a contact surface area of the modified surface. Another apparatus includes a modified surface that includes furrows and ridges forming a reduced contact surface area to reduce a sticking of an object to the modified surface, the ridges having an elastic property that causes the reduced contact surface area to increase when the plurality of ridges is elastically deformed.
    Type: Application
    Filed: October 22, 2019
    Publication date: December 30, 2021
    Applicant: ASML Holding N.V.
    Inventors: Mehmet Ali AKBAS, Tammo UITTERDIJK, Christopher John MASON, Matthew LIPSON, David Hart PETERSON, Michael PERRY, Peter HELMUS, Jerry Jianguo DENG, Damoon SOHRABIBABAHEIDARY