Abstract: Described is an apparatus for measuring mass change under high pressure, comprising: a high pressure cell comprising a reference quartz crystal microbalance sensor and a sample quartz crystal microbalance sensor, wherein the sample quartz crystal microbalance sensor is coated with a test sample selected from the group consisting of nanoporous materials and metal-organic frameworks; a pressure sensor operatively connected to the high pressure cell; a thermocouple operatively connected to the high pressure cell, wherein the high pressure cell is maintained at a pre-selected temperature; a gas inlet fluidly connected to the high pressure cell; and a gas outlet fluidly connected to the high pressure cell. Also described are methods of making and using the apparatus.

Abstract: The present invention relates to a high-pressure quartz crystal microbalance sensor that is capable of measuring adsorption and diffusion characteristics of nanoporous materials and thin films at high pressures.

Abstract: Microfluidic pumps, methods of fabrication thereof, and methods of use thereof, as well as method of pumping a fluid, are disclosed.

Abstract: A system for monitoring low dynamic pressures in confined spaces, such system comprising a catheter, a multilayered corrugated membrane of diameter less than 2 mm with a reflective inner layer mounted within said catheter; a set of optical fibers comprising one or more illuminating fibers and two or more detecting fibers which are contained within said catheter and whose ends are set at differing distances from the membrane; an illuminating system coupled to said illuminating fibers; and a detection system coupled to said illuminating fibers.

Abstract: Devices including conductometric porous silicon gas sensors, methods of fabricating conductometric porous silicon gas sensors, methods of selecting a device, methods of detecting a concentration of a gas, and methods of analyzing data.

Abstract: Disclosed are various systems and methods to generate rotary motion. In one embodiment, a system is provided, which comprises one or more anchors, and a mass configured for rotary motion. Also, one or more compliant two-position mechanisms are attached to the mass and to the one or more anchors. The compliant two-position mechanisms restrict the rotary motion of the mass from a first angular position to a second angular position.

Abstract: A system for monitoring low dynamic pressures in confined spaces, such system comprising a catheter, a multilayered corrugated membrane of diameter less than 2 mm with a reflective inner layer mounted within said catheter; a set of optical fibers comprising one or more illuminating fibers and two or more detecting fibers which are contained within said catheter and whose ends are set at differing distances from the membrane; an illuminating system coupled to said illuminating fibers; and a detection system coupled to said illuminating fibers.

Abstract: Microfluidic pumps, methods of fabrication thereof, and methods of use thereof, as well as method of pumping a fluid, are disclosed.

Abstract: Devices including conductometric porous silicon gas sensors, methods of fabricating conductometric porous silicon gas sensors, methods of selecting a device, methods of detecting a concentration of a gas, and methods of analyzing data.

Abstract: A sensor is disclosed. A representative sensor includes a silicon substrate having a porous silicon region. A portion of the porous silicon region has a front contact is disposed thereon. The contact resistance between the porous silicon region and the front contact is between about 10 ohms and 100 ohms.

Abstract: A microvalve which utilizes a low temperature (<300° C.) fabrication process on a single substrate. The valve uses buckling and an electromagnetic actuator to provide a relatively large closing force and lower power consumption. A buckling technique of the membrane is used to provide two stable positions for the membrane, and to reduce the power consumption and the overall size of the microvalve. The use of a permanent magnet is an alternative to the buckled membrane, or it can be used in combination with the buckled membrane, or two sets of micro-coils can be used in order to open and close the valve, providing the capability for the valve to operate under normally opened or normally closed conditions. Magnetic analysis using ANSYS 5.7 shows that the addition of Orthonol between the coils increases the electromagnetic force by more than 1.5 times. At a flow rate of 1 mL/m, the pressure drop is <100 Pa.

Abstract: An improved pin array assembly and method of manufacture of the pin array assembly are provided. A pin array assembly includes a single crystal silicon wafer. The single crystal silicon wafer is formed to define a base and an array of pins. Each of the pins has a shaft and a tip surface. The pin shaft is hydrophobic and the pin tip surface is hydrophilic. The method of manufacture of the pin array assembly includes the steps of forming an initial shape of a single crystal silicon wafer to define a base and an array of pins. The initial shape of a single crystal silicon wafer is etched and the array of pins is polished. The step of forming an initial shape of a single crystal silicon wafer to define a base and an array of pins includes mechanically sawing the single crystal silicon wafer to define a base and an array of pins. Chemical treatment of the pins is performed to make the shaft of the pins hydrophobic and to make the pin tip surfaces hydrophilic.