Patents by Inventor Peter J. Baumgartner

Peter J. Baumgartner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Advanced illumination system for use in microlithography
    Patent number: 6775069
    Abstract: The present invention relates to an illumination system including an illumination source, a beam conditioner placed in an optical path with the illumination source, a first diffractive array, a condenser system and a second diffractive array. The illumination source directs light through the beam conditioner onto the first diffractive array. The light is then directed to the condenser system placed in an optical path between the first diffractive array and second diffractive array. The condenser system includes a plurality of stationary optical elements and a plurality of movable optical elements. The plurality of movable optical elements are placed in an optical path with the plurality of stationary optical elements. The movable optical elements are capable of translation between the plurality of stationary optical element to zoom the light received from the first diffractive array.
    Type: Grant
    Filed: October 16, 2002
    Date of Patent: August 10, 2004
    Assignee: ASML Holding N.V.
    Inventors: Mark Oskotsky, Lev Ryzhikov, Scott Coston, James Tsacoyeanes, Peter J. Baumgartner, Walter Augustyn
  • Advanced illumination system for use in microlithography
    Publication number: 20030076679
    Abstract: The present invention relates to an illumination system including an illumination source, a beam conditioner placed in an optical path with the illumination source, a first diffractive array, a condenser system and a second diffractive array. The illumination source directs light through the beam conditioner onto the first diffractive array. The light is then directed to the condenser system placed in an optical path between the first diffractive array and second diffractive array. The condenser system includes a plurality of stationary optical elements and a plurality of movable optical elements. The plurality of movable optical elements are placed in an optical path with the plurality of stationary optical elements. The movable optical elements are capable of translation between the plurality of stationary optical element to zoom the light received from the first diffractive array.
    Type: Application
    Filed: October 16, 2002
    Publication date: April 24, 2003
    Applicant: ASML US, Inc.
    Inventors: Mark Oskotsky, Lev Ryzhikov, Scott Coston, James Tsacoyeanes, Peter J. Baumgartner, Walter Augustyn